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Surface profilometer, consisting primarily of commercially available components, measures surface topographical features accurately and precisely. It shows improvement over the interferometric technique in measurement of grain-boundary grooves formed during annealing on nickel-oxide bicrystals.
Computer-controlled system saves time and labor. Electromechanical scanning system automatically measures deviation of sheets and plates from flatness. Quickly measures surface profile and detects bumps, bulges, and indentations as small as 0.001 in. in height or depth. X-y table moves specimen to programmed locations under digital linear variable differential transformer (LVDT) while computer records surface-height readings of LVDT. Resulting graphical display shows surface contour.
An all-optical micro motor with a rotor driven by a traveling wave of surface deformation of a stator being in contact with the rotor is being studied. Instead of an ultrasonic wave produced by an electrically driven piezoelectric actuator as in ultrasonic motors, the wave is a result of a photo induced surface deformation of a photosensitive material produced by a traveling holographic grating. Two phase modulated coherent optical beams generate the grating. Several types of photosensitive materials are studied such as photorefractive crystals, photosensitive piezoelectric ceramics, and side-chain liquid crystalline polyesters. In order to be considered as a possible candidate for micro motors, the material should exhibit surface deformation produced by moving grating of the order of 10 micron. Deformations produced by static holographic gratings are studied in photorefractive crystals of LiNbO3 using high vertical resolution surface profilometer Dektak 3 and surface interferometer WYKO. An experimental set-up with moving grating has been developed. The set-up uses a two-beam interferometry configuration with one beam being reflected by a thin mirror mounted on a loud speaker. A ramp voltage signal generator drives the speaker. Changing voltage, polarity, and frequency of the signal can easily generate vibrating gratings or moving gratings in both directions. A vibrating grating has been applied to a photorefractive crystal of BSO controlled by an external electric field of the order of 104 V/cm. We have additionally studied effects of moving grating interaction with light absorbing fluids such as solutions of 2,9,16,23-Tetrakis(phenylthio)-29H, 31 Hphthalocyanine in chlorobenzene in capillary tubes. The purpose of using a liquid is to show that the moving gratings can force a liquid to shift. The interaction of a single low power focused laser beam at 633 nm with such fluid produced an intensive circular motion, which also might be applied to all-optical micro motors or actuators.
An all-optical micromotor with a rotor driven by a traveling wave of surface deformation of a stator being in contact with the rotor is being studied. Instead of an ultrasonic wave produced by an electrically driven piezoelectric actuator as in ultrasonic motors, the wave is a result of a photo-induced surface deformation of a photosensitive material produced by an incident radiation. A thin piezoelectric polymer will deform more easily LiNbO3 or metal when irradiated with light. The type of photosensitive material studied are piezoelectric polymers with and without coatings for connecting electrodes. In order to be considered as a possible candidate for micromotors, the material should exhibit surface deformation produced by a laser beam of the order of 10 microns. This is compared to the deformations produced by static holographic gratings studied in photorefractive crystals of LiNbO3 using high vertical resolution surface profilometer Dektak 3 and surface interferometer WYKO. An experimental setup showing the oscillations has been developed. The setup uses a chopped beam from an Argon ion laser to produce the deformation while a probe beam is reflected by the thin film into a fiber which is then detected on an oscilloscope. A ramp voltage signal generator will drive the piezoelectric film in another experiment to determine the resonance of the film. A current is generated when light is incident upon the film and this current can be measured. The reverse process has already been demonstrated in other piezoelectric actuators. Changing voltage, polarity, and frequency of the signal can easily generate vibrations similar to those when light is incident on the film. This can be compared to the effects of laser interaction with light absorbing fluids such as solutions of 2,9,16,23-Tetrakis(phenylthio)-29H, 31 H-phthalocyanine in chlorobenzene in capillary tubes, The possibility of using a liquid with the piezoelectric film would be a novel idea for a micromotor since the interaction of a single low power focused laser beam at 633 nm with such fluid produced an intensive circular motion.
Projected-fringe, phase-stepping profilometer is system of optical, electronic, optoelectronic, and electro-optical equipment measuring surface profiles of objects. Projects optical interference pattern onto object and steps phase of pattern to extract phases of interfering beams where they intersect object. Data obtained within seconds. Noncontact, full-field surface profilometer has applications, including inspection of machined and ceramic parts, printed circuit boards, and optical components. Rugged and compact, measures surfaces with variety of sizes and finishes.
Measurements were made with a new test for improved quantitative estimation of the mechanical protection of thin films on optical materials. The mechanical damage was induced by a sand blasting system using spherical glass beads. Development of the surface damage was measured by the changes in the specular transmission and reflection, and by inspection using a surface profilometer and a scanning electron microscope. The changes in the transmittance versus the duration of sand blasting was measured for uncoated fused silica slides and coated ones. It was determined that the diamond like carbon films double the useful optical lifetime of the fused silica. Theoretical expressions were developed to describe the stages in surface deterioration. Conclusions were obtained for the SiO2 surface mechanism and for the film removal mechanism.
The erosion of an aluminum alloy impinged by crushed glass particles at normal incidence was studied. The erosion patterns were analyzed by scanning electron microscopy, energy dispersive X-ray spectroscopy, and surface profilometer measurements. From the analysis of specimens tested at various driving gas pressures and time intervals, four distinct erosion regions were identified. A study of pit morphology and its relationship to cumulative erosion was made. Cutting wear is believed to be the predominant material removal mechanism; some evidence of deformation wear was found during the incubation period.
To study the sea-ice interactive region in the Bering and Greenland Seas a series of experimental compaigns, the Marginal Ice Zone Experiment (MIZEX) has been planned. A major objective of MIZEX is the development of a capability to relate the morphology and distribution of the sea ice to atmospheric and oceanographic parameters in an overall model. During the first part of the MIZEX, a 13.7 GHz microwave radar altimeter/scatterometer having a pulse length of 16 nanoseconds was flown over the Bering Sea Marginal ice zone. On the same aircraft were the NASA GSFC 19 GHz Electronically Scanning Microwave Radiometer (ESMR), scanning radiometers and an infrared, nadir pointing, temperature sounder. The altimeter/scatterometer was operated in nadir pointing and conically scanning modes to collect measurements of reflectivity and pulse shapes. These will be related to sea-ice classifications, ocean wave spectra and coincident microwave and infrared radiometric measurements and laser profilometer surface roughness estimates.
Various high quality epitaxial films, especially oxides, have been synthesized using off-axis sputtering deposition. In this presentation, we report the experiment results of ZnO films grown by the off-axis sputtering deposition. Films were synthesized in temperatures ranged from room temperature to 600 C, and pressures from 5 mTorr to 150 mTorr. Film growth rate was measured by surface profilometer, ellipsometer, and wavelength dispersive spectrometry. Due to the collisions between the sputtered species and the residue gases, the kinetic energy of species was reduced and the transport of depositing species changed from a ballistic movement for low pressure to a diffusive drift for high pressure in which the transport species were almost thermalized. The measurements show an increase of growth rates along the gravity vector when the Knudsen number of transport species is less than 0.05, which suggests that gravity affected the transport characterization in off-axis sputtering deposition. Because the product of pressure (p) and travel distance (d) of sputtered species, pd, exceeds several mTorr-cm during film deposition, the classical simulations for sputtering process in high vacuum system may not be applied. Based on these experimental measurements, a transport process of the off-axis sputtering deposition is proposed. Several models including the Monte Carlo method and gravity-driven flow dynamics simulation will be discussed.
Various high quality epitaxial films, especially oxides, have been synthesized using off-axis sputtering deposition. In this presentation, we report the experiment results of ZnO films grown by the off-axis sputtering deposition. Films were synthesized in temperatures ranged from room temperature to 600 C, and pressures from 5 mTorr to 150 mTorr. Film growth rate was measured by surface profilometer, ellipsometer, and wavelength dispersive spectrometry. Due to the collisions between the sputtered species and the residue gases, the kinetic energy of species was reduced and the transport of depositing species changed from a ballistic movement for low pressure to a diffuse drift for high pressure in which the transport species were almost thermalized. The measurements show an increase of growth rates along the gravity vector when the Knodson (Knudsen??) number of transport species is less than 0.05, which suggests that gravity affected the transport characterization in off-axis sputtering deposition. Because the product of pressure (p) and travel distance (d) of sputtered species, p exceeds several mTorr-cm during film deposition, the classical simulations for sputtering process in high vacuum system may not be applied. Based on these experimental measurements, a transport process of the off-axis sputtering deposition is proposed. Several methods including the Monte Carlo method and gravity-driven flow dynamics simulation will be discussed.
A method of adaptive signal processing has been proposed as the basis of a new generation of interferometric optical profilometers for measuring surfaces. The proposed profilometers would be portable, hand-held units. Sizes could be thus reduced because the adaptive-signal-processing method would make it possible to substitute lower-power coherent light sources (e.g., laser diodes) for white light sources and would eliminate the need for most of the optical components of current white-light profilometers. The adaptive-signal-processing method would make it possible to attain scanning ranges of the order of decimeters in the proposed profilometers.
The design concept and system operation of an optical profilometer are discussed, and a preliminary evaluation of a breadboard system is presented to demonstrate the feasibility of the optical profilometer technique. Measurement results are presented for several test surfaces; and to illustrate a typical application, results are shown for a cleft palate cast used by dental surgeons. Finally, recommendations are made for future development of the optical profilometer technique for specific engineering or scientific applications.
In order to fulfill the angular resolution requirements and make the performance goals for future NASA missions feasible, it is crucial to develop instruments capable of fast and precise figure metrology of x-ray optical elements for further correction of the surface errors. The Long Trace Profilometer (LTP) is an instrument widely used for measuring the surface figure of grazing incidence X-ray mirrors. In the case of replicated optics designed for x-ray astronomy applications, such as mirrors and the corresponding mandrels have a cylindrical shape and their tangential profile is parabolic or hyperbolic. Modern LTPs have sub-microradian accuracy, but the measuring speed is very low, because the profilometer measures surface figure point by point using a single laser beam. The measurement rate can be significantly improved by replacing the single optical beam with multiple beams. The goal of this study is to demonstrate the viability of multi-beam metrology as a way of significantly improving the quality and affordability of replicated x-ray optics. The multi-beam LTP would allow one- and two-dimensional scanning with sub-microradian resolution and a measurement rate of about ten times faster compared to the current LTP. The design details of the instrument's optical layout and the status of optical tests will be presented.
Various papers on surface characterization and testing are presented. Individual topics addressed include: simple Hartmann test data interpretation, optimum configuration of the Offner null corrector, system for phase-shifting interferometry in the presence of vibration, fringe variation and visibility in speckle-shearing interferometry, functional integral representation of rough surfaces, calibration of surface heights in an interferometric optical profiler, image formation in common path differential profilometers, SEM of optical surfaces, measuring surface profiles with scanning tunneling microscopes, surface profile measurements of curved parts, high-resolution optical profiler, scanning heterodyne interferometer with immunity from microphonics, real-time crystal axis measurements of semiconductor materials, radial metrology with a panoramic annular lens, surface analysis for the characterization of defects in thin-film processes, Spacelab Optical Viewport glass assembly optical test program for the Starlab mission, scanning differential intensity and phase system for optical metrology.
Light optical and scanning electron microscope studies were conducted to characterize the erosion resistance of polymethyl methacrylate (PMMA), polycarbonate (PC), polytetrafluoroethylene (PTFE) and ultra-high-molecular-weight-polyethylene (UHMWPE). Erosion was caused by a jet of spherical micro-glass beads at normal impact. During the initial stages of damage, the surfaces of these materials were studied using a profilometer. Material buildup above the original surface was observed on PC and PMMA. As erosion progressed, this buildup disappeared as the pit became deeper. Little or no buildup was observed on PTFE and on UHMWPE. UHMWPE and PTFE are the most resistant materials and PMMA the least. Favorable properties for high erosion resistance seem to be high values of ultimate elongation, and strain energy and a low value of the modulus of elasticity. Erosion-rate-versus-time curves of PC and PTFE exhibit incubation, acceleration and steady state periods. A continuously increasing erosion rate period was observed however for PMMA instead of a steady state period. At early stages of damage and at low impact pressure material removal mechanisms appear to be similar to those for metallic materials.
Light optical and scanning electron microscope studies were conducted to characterize the erosion resistance of polymethyl methacrylate (PMMA), polycarbonate (PC), polytetrafluoroethylene (PTFE) and ultra-high-molecular-weight-polyethylene (UHMWPE). Erosion was caused by a jet of spherical micro-glass beads at normal impact. During the initial stages of damage, the surfaces of these materials were studied using a profilometer. Material buildup above the original surface was observed on PC and PMMA. As erosion progressed, this buildup disappeared as the pit became deeper. Little or no buildup was observed on PTFE and on UHMWPE. UHMWPE and PTFE are the most resistant materials and PMMA the least. Favorable properties for high erosion resistance seem to be high values of ultimate elongation, and strain energy and a low value of the modulus of elasticity. Erosion-rate-versus-time curves of PC and PTFE exhibit incubation, acceleration and steady state periods. A continuously increasing erosion rate period was observed however for PMMA instead of a steady state period. At early stages of damage and at low impact pressure material removal mechanisms appear to be similar to those for metallic materials.
Ge(1-x)Si(x)(0 less than x less than 0.12) has been grown by the vertical Bridgman technique using adjustments in the applied temperature profile to control the pressure difference between the bottom and top of the melt. Using this technique, a pressure difference is created by decreasing the temperature in the gas volume above the melt while the sample is molten but prior to growth. A maximum pressure difference approximately equal to the hydrostatic pressure of the molten sample can thus be obtained. Several GeSi crystals were grown in pyrolitic boron nitride ampoules. When a pressure difference was applied, samples were reproducibly grown mostly detached. For comparison, samples were also grown in a configuration in which gas could flow freely between the gap below the melt and the volume above the melt and no pressure difference could be established. These samples were initially attached. Existence of detachment was determined both by measuring the surface roughness of the samples with a profilometer and by observations of the sample surfaces with optical and electron microscopy.
Ge(1-x)Si(x) (0 less than x less than 0.12) has been grown by the vertical Bridgman technique using adjustments in the applied temperature profile to control the pressure difference between the bottom and top of the melt. Using this technique. a pressure difference is created by decreasing the temperature in the gas volume above the melt while the sample is molten but prior to growth. A maximum pressure difference approximately equal to the hydrostatic pressure of the molten sample can thus be obtained. Several GeSi crystals were grown in pyrolitic boron nitride ampoules. When a pressure difference was applied, samples were reproducibly grown mostly detached. For comparison, samples were also grown in a configuration in which gas could flow freely between the gap below the melt and the volume above the melt and no pressure difference could be established. These samples were initially attached. Existence of detachment was determined both by measuring the surface roughness of the samples with a profilometer and by observations of the sample surfaces with optical and electron microscopy.