NASA NTRS · 19700008009
Development of ion implantation techniques for microelectronics
Abstract
Ion implantation techniques for p-n junction diodes of silicon carbide and gallium arsenide
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Dunlap, H. L., Hunsperger, R. G., Marsh, O. J.. 1969-10-01. Development of ion implantation techniques for microelectronics. https://ntrs.nasa.gov/citations/19700008009
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