NASA NTRS · 19870017773
Nondestructive SEM for surface and subsurface wafer imaging
Abstract
The scanning electron microscope (SEM) is considered as a tool for both failure analysis as well as device characterization. A survey is made of various operational SEM modes and their applicability to image processing methods on semiconductor devices.
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Propst, Roy H., Bagnell, C. Robert, Cole, Edward I., Jr., Davies, Brian G., Dibianca, Frank A., Johnson, Darryl G., Oxford, William V., Smith, Craig A.. 1987-08-01. Nondestructive SEM for surface and subsurface wafer imaging. https://ntrs.nasa.gov/citations/19870017773
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