NASA NTRS · 19900046530
EUV efficiency of a 6000-grooves per mm diffraction grating
Abstract
In order to explore whether grooves ruled mechanically at a density of 6000 per mm can perform well at EUV wavelengths, a sample grating is measured with this density in an EUV calibration facility. Measurements are presented of the planar uniform line-space diffraction grating's efficiency and large-angle scattering.
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Hurwitz, Mark, Bowyer, Stuart, Edelstein, Jerry, Harada, Tatsuo, Kita, Toshiaki. 1990-05-01. EUV efficiency of a 6000-grooves per mm diffraction grating. https://ntrs.nasa.gov/citations/19900046530
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