NASA NTRS · 19940000119
Making Rectangular Apertures In Silicon
Abstract
Conventional silicon micromachining techniques produce micrometer-sized rectangular apertures. Used to define source and detector openings for measurements of images and scattered light in visible, ultraviolet, and soft x-ray wavelength regions, and as general-purpose optical slits or slit arrays. Rectangular microscopic apertures replace circular pinholes made by puncturing foils with needles or by drilling foils with intense, highly-focused laser beams. Precise photolithography yields apertures of superior geometry.
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Leviton, Douglas B., Jhabvala, Murzy D., Mott, Brent, Manthripragada, Sridhar. 1994-02-01. Making Rectangular Apertures In Silicon. https://ntrs.nasa.gov/citations/19940000119
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