NASA NTRS · 19950065252
Small-Modulation Ellipsometer
Abstract
Small-modulation ellipsometer contains no moving parts and insensitive to small misalignments. Provides real-time, simultaneous measurements of both ellipsometric parameters, without need for separate calibration measurement or tedious adjustments. Can be made compact and rugged for operation in harsh environments.
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Woollam, J., Johs, B., Ducharme, S., Machlab, H.. 1995-02-01. Small-Modulation Ellipsometer. https://ntrs.nasa.gov/citations/19950065252
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