NASA NTRS · 20020073077
Folded Coplanar Waveguide Slot Antenna on Silicon Substrates With a Polyimide Interface Layer
Abstract
A novel mm-wave Coplanar Waveguide (CPW) folded slot antenna is characterized on low-resistivity Si substrate (1 omega-cm) and a high resistivity Si substrate with a polyimide interface layer for the first time. The antenna resonates around 30 GHz with a return loss greater than 14.6 dB. Measured radiation patterns indicate the existence of a main lobe, but the radiation pattern is affected by a strong surface wave mode, which is greater in the high resistivity Si wafer.
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Bacon, Andrew, Ponchak, George E., Papapolymerou, John, Bushyager, Nathan, Tentzeris, Manos, Williams, W. D.. 2002-01-01. Folded Coplanar Waveguide Slot Antenna on Silicon Substrates With a Polyimide Interface Layer. https://ntrs.nasa.gov/citations/20020073077
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