NASA NTRS · 20060031060
Minimum dimension dimple analysis. MEMS Reliability Alliance Technical Report 36-02
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Lin, G., Lawton, R., Wellman, J., Phinney, L.. 2000-07-14. Minimum dimension dimple analysis. MEMS Reliability Alliance Technical Report 36-02. https://ntrs.nasa.gov/citations/20060031060
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