NASA NTRS · 20060031061
Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01
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Lawton, R., Lin, G., Wellman, J.. 2000-08-04. Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01. https://ntrs.nasa.gov/citations/20060031061
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