NASA NTRS · 20060032257
Establishing Engineering Methods and Criteria Required by Predictive Analysis for Mechanical Reliability of MEMS Structures
Abstract
The expanding areas of MEMS applications are often characterized by demanding operating conditions or harsh environments for those sensitive devices.
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Lawton, R., Knauss, W.. 2000-01-22. Establishing Engineering Methods and Criteria Required by Predictive Analysis for Mechanical Reliability of MEMS Structures. https://ntrs.nasa.gov/citations/20060032257
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