NASA NTRS · 20060034426
3D Metrology for Process Control and Structure Integrity for Evaluating MEMS Reliability for Space Applications
Abstract
MEMS fabrication processes are as diverse as their applications.
Explore related subjects
Keep this discovery
Explore connections, maps & timelines
Lawton, R., Krueger, R., Koester, D.. 1999-10-26. 3D Metrology for Process Control and Structure Integrity for Evaluating MEMS Reliability for Space Applications. https://ntrs.nasa.gov/citations/20060034426
Cite the original work for its findings. Save a collection to share your selection of sources.