NASA NTRS · 20060040521
A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-nanometer Surface Metrology
Abstract
A multi-channel heterodyne laser interferometer is proposed for the JPL Thermo-Opto-Mechanical Testbed, which requires the measurement of optical surface deformations at the sub-nanometer level.
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Zhao, F., Logan, J., Shaklan, S., Shao, M.. 1999-06-16. A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-nanometer Surface Metrology. https://ntrs.nasa.gov/citations/20060040521
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