NASA NTRS · 20060041040
Stitching Error Reduction in Electron Beam Written Gratings
Abstract
A multiple-write electron beam lithography techniques is described as linear filter on the grating spatial frequency spectrum.
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Dougherty, D., Muller, R., Maker, P., Mansour, K., Chacon, R., Qiu, Y., Young, M., Forouhar, S.. 2000-05-01. Stitching Error Reduction in Electron Beam Written Gratings. https://ntrs.nasa.gov/citations/20060041040
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