NASA NTRS · 20060041282
Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures
Abstract
We present a new microscopy tool for quantitative measurement of the resonant motion of microstructures. The new instrument uses optical interferometry to generate a three dimentional surface topographic map of a vibrating micormachined resonator in vacuum.
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Gutierrez, R. C., Shcheglov, K. V., Tang, T. K.. 1998-06-07. Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures. https://ntrs.nasa.gov/citations/20060041282
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