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NASA NTRS · 20210003246

MEMS Reliability Assurance Activities at JPL

Stark, B.·Lawton, R.·Kayali, S.
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Abstract

UNKNOWN

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MEMsreliabilityassurancesinglecrystalsiliconpolycrystalineCMOSLIGA

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Stark, B., Lawton, R., Kayali, S.. 1999-03-08. MEMS Reliability Assurance Activities at JPL. https://ntrs.nasa.gov/citations/20210003246

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