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DOE OSTI · 1170735

Electrostatic MEMS devices with high reliability

Goldsmith, Charles L·Auciello, Orlando H·Sumant, Anirudha V·Mancini, Derrick C·Gudeman, Chris·Sampath, Suresh·Carlilse, John A·Carpick, Robert W·Hwang, James
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Abstract

The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

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BibTeXRIS

Goldsmith, Charles L, Auciello, Orlando H, Sumant, Anirudha V, Mancini, Derrick C, Gudeman, Chris, Sampath, Suresh, Carlilse, John A, Carpick, Robert W, Hwang, James. 2015-02-24. Electrostatic MEMS devices with high reliability. https://www.osti.gov/biblio/1170735

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