Pattern-generation and pattern-transfer for single-digit nano devices

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Rangelow, Ivo W., Ahmad, Ahmad, Ivanov, Tzvetan, Kaestner, Marcus, Krivoshapkina, Yana, Angelov, Tihomir, Lenk, Steve, Lenk, Claudia, Ishchuk, Valentyn, Hofmann, Martin, Nechepurenko, Diana, Atanasov, Ivaylo, Volland, Burkhard, Guliyev, Elshad, Durrani, Zahid, Jones, Mervyn, Wang, Chen, Liu, Dixi, Reum, Alexander, Holz, Mathias, Nikolov, Nikolay, Majstrzyk, Wojciech, Gotszalk, Teodor, Staaks, Daniel, Dallorto, Stefano, Olynick, Deirdre L.. 2016-11-03. Pattern-generation and pattern-transfer for single-digit nano devices. https://doi.org/10.1116/1.4966556

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