DOE OSTI · 1501971
CMOS compatible processing for phosphorous delta-layer nanoscale electronics.
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Campbell, DeAnna Marie, Marshall, Michael Thomas, Maurer, Leon, Koepke, Justin, Lu, Tzu-Ming, Ward, Daniel Robert, Misra, Shashank. 2018-03-01. CMOS compatible processing for phosphorous delta-layer nanoscale electronics.. https://www.osti.gov/biblio/1501971
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