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DOE OSTI · 1592119

APS-TD Cleanroom Facilities

Bice, D.·Baker, C.·Kuhn, B.·Penhollow, A.
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Abstract

Poster features 4 cleanrooms within the control of APS-TD, all with their own class 1000, Class 100, and Class 10 areas. Each cleanroom is equipped with areas suited for parts cleaning and preparation, particle free assemblies, UHV evacuation, leak detection and residual gas analysis.

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Bice, D., Baker, C., Kuhn, B., Penhollow, A.. 2020-01-17. APS-TD Cleanroom Facilities. https://doi.org/10.2172/1592119

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