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DOE OSTI · 1600276

High sensitivity single-axis MEMS accelerometer with bilateral flexures

Resnick, Paul J.·Homeijer, Brian D.·Friedmann, Thomas A.·Wiwi, Michael
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Abstract

A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.

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71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

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BibTeXRIS

Resnick, Paul J., Homeijer, Brian D., Friedmann, Thomas A., Wiwi, Michael. 2019-11-12. High sensitivity single-axis MEMS accelerometer with bilateral flexures. https://www.osti.gov/biblio/1600276

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