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DOE OSTI · 1600415

Magnetoelastically actuated MEMS device and methods for its manufacture

Langlois, Eric·Arrington, Christian L.·Finnegan, Patrick S.·Hollowell, Andrew E.·Pillars, Jamin Ryan·Monson, Todd
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Abstract

A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.

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36 MATERIALS SCIENCE75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

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BibTeXRIS

Langlois, Eric, Arrington, Christian L., Finnegan, Patrick S., Hollowell, Andrew E., Pillars, Jamin Ryan, Monson, Todd. 2019-12-17. Magnetoelastically actuated MEMS device and methods for its manufacture. https://www.osti.gov/biblio/1600415

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36 MATERIALS SCIENCE↗