DOE OSTI · 1642613
Top-Down Etch Processes for III-Nitride Nanophotonics.
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Wang, George T., Leung, Benjamin, Tsai, Miao-Chan, Sapkota, Keshab Raj, Kazanowska, Barbara Anna, Jones, Kevin S.. 2019-09-01. Top-Down Etch Processes for III-Nitride Nanophotonics.. https://doi.org/10.1109/ipcon.2019.8908526
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