DOE OSTI · 1700542
Low Thermal Budget Gate Stack for Atomic Precision Devices.
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Anderson, Evan Michael, Schmucker, Scott William, Campbell, DeAnna Marie, Lu, Tzu-Ming, Baczewski, Andrew David, Arghavani, Reza, Ward, Daniel Robert. 2019-10-01. Low Thermal Budget Gate Stack for Atomic Precision Devices.. https://www.osti.gov/biblio/1700542
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