DOE OSTI · 1702242
Highly sensitive MEMS frequency modulated accelerometer with small footprint
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Esteves Moreira, Eurico, Kuhlmann, Burkhard, Serra Alves, Filipe, Alves Dias, Rosana, Cabral, Jorge, Gaspar, João, Rocha, Luis Alexandre. 2020-06-01. Highly sensitive MEMS frequency modulated accelerometer with small footprint. https://doi.org/10.1016/j.sna.2020.112005
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