DOE OSTI · 1763832
Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al 2 O 3 by trimethylaluminum
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Myers, Tyler J., Cano, Austin M., Lancaster, Diane K., Clancey, Joel W., George, Steven M.. 2021-03-01. Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al 2 O 3 by trimethylaluminum. https://doi.org/10.1116/6.0000680
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