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DOE OSTI · 1799481

High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair

Mahdavi, Mohammad·Coskun, M. Bulut·Moheimani, S. Reza
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Abstract

We present a novel approach to fundamentally eliminate electrical feedthrough (cross-talk) signal in self-sensing piezoelectric microcantilevers, used in dynamic mode atomic force microscopy (AFM). The probe is an Si microcantilever on which a two-layer piezoelectric stack transducer is microfabricated. The top transducer in the stack functions as an actuator, while the bottom transducer is used as a deflection sensor. This arrangement leads to a collocated actuator-sensor pair that co-exist on the same surface area. We report experimental results that establish the sensor's ability to capture the full dynamic range of the cantilever with minimal feedthrough from the actuator.

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Mahdavi, Mohammad, Coskun, M. Bulut, Moheimani, S. Reza. 2020-02-04. High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair. https://doi.org/10.1109/jmems.2020.2967794

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