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DOE OSTI · 1807510

Beam power scale-up in micro-electromechanical systems based multi-beam ion accelerators

Ji, Q.·Afridi, K. K.·Bauer, T.·Giesbrecht, G.·Hou, Y.·Lal, A.·Ni, D.·Persaud, A.·Qin, Z.·Seidl, P.·Sinha, S.·Schenkel, T.
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Abstract

We report on the development of multi-beam RF linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 120 beams. The total argon ion current extracted from the 120-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path of using this technology to achieve ion currents >1 mA and ion energies >100 keV for applications in materials processing.

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BibTeXRIS

Ji, Q., Afridi, K. K., Bauer, T., Giesbrecht, G., Hou, Y., Lal, A., Ni, D., Persaud, A., Qin, Z., Seidl, P., Sinha, S., Schenkel, T.. 2021-10-01. Beam power scale-up in micro-electromechanical systems based multi-beam ion accelerators. https://doi.org/10.1063/5.0058175

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