A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy

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Alipour, Afshin, Coskun, M. Bulut, Moheimani, S. O. Reza. 2021-04-01. A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy. https://doi.org/10.1109/jmems.2021.3052180

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