An in-situ single photon source detection platform for deterministic nanometer resolution ion implantation.

Titze, Michael Dominik; Chandrasekaran, Vignesh; Htoon, Han; Bielejec, Edward S.

doi:10.2172/1856095

DOE OSTI · 1856095

An in-situ single photon source detection platform for deterministic nanometer resolution ion implantation.

Titze, Michael Dominik·Chandrasekaran, Vignesh·Htoon, Han·Bielejec, Edward S.

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Titze, Michael Dominik, Chandrasekaran, Vignesh, Htoon, Han, Bielejec, Edward S.. 2021-03-01. An in-situ single photon source detection platform for deterministic nanometer resolution ion implantation.. https://doi.org/10.2172/1856095

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