DOE OSTI · 1869544
On-Wafer Microfabricated Test Structures for Characterizing RF Breakdown in Narrow Gaps.
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Ruyack, Alexander, Jordan, Matthew, Moore, Christopher, Hummel, Gwendolyn, Herrera, Sergio A., Ballance, Mark Harry, Bingham, Andrew Joel, Schiess, Adrian Rain Boese, Gibson, Christopher Baron, Nordquist, Christopher. 2021-05-01. On-Wafer Microfabricated Test Structures for Characterizing RF Breakdown in Narrow Gaps.. https://doi.org/10.2172/1869544
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