DOE OSTI · 1892646
Molecular layer etching
Abstract
A method of etching an organic or hybrid inorganic/organic material. The method etches molecular layer deposition coatings. An etching cycle comprises a first half reaction exposing the coating to a precursor. A second half reaction exposes a second precursor, removing or etching a portion of the coating.
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Young, Matthias John, Letourneau, Stephen Payonk, Choudhury, Devika, Elam, Jeffrey W., Yanguas-Gil, Angel, Mane, Anil U.. 2022-02-22. Molecular layer etching. https://www.osti.gov/biblio/1892646
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