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DOE OSTI · 1996695

Fabrication of Atomic-scale Defect Structures within 2D Materials through Automated Electron Beam Control

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Boebinger, Matthew, Roccapriore, Kevin, Ghosh, Ayana, Xiao, Kai, Lupini, Andrew, Ziatdinov, Maxim, Kalinin, Sergei V., Unocic, Raymond. 2023-08-01. Fabrication of Atomic-scale Defect Structures within 2D Materials through Automated Electron Beam Control. https://doi.org/10.1093/micmic%2Fozad067.710

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