DOE OSTI · 2473338
Industrial data-driven machine learning soft sensing for optimal operation of etching tools
Abstract
Not Available
Keep this discovery
Explore connections, maps & timelines
Ou, Feiyang, Wang, Henrik (ORCID:0000000158631209), Zhang, Chao, Tom, Matthew (ORCID:0000000278927418), Bom, Sthitie, Davis, James F., Christofides, Panagiotis D.. 2024-12-01. Industrial data-driven machine learning soft sensing for optimal operation of etching tools. https://doi.org/10.1016/j.dche.2024.100195
Cite the original work for its findings. Save a collection to share your selection of sources.