DOE OSTI · 2475534
Microscopic and elemental analysis of temperature-induced changes in sulfur/silicon nitride stack-passivated Si surface
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Mouri, Tasnim Kamal, Upadhyaya, Ajay, Rohatgi, Ajeet, Woo OK, Young, Shafarman, William N., Das, Ujjwal K.. 2025-02-01. Microscopic and elemental analysis of temperature-induced changes in sulfur/silicon nitride stack-passivated Si surface. https://doi.org/10.1016/j.apsusc.2024.161557
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