Abnormal Silicon Etching Behaviors in Nanometer-Sized Channels

Keep this discovery

Explore connections, maps & timelines

Koo, Kunmo, Chang, Joon (ORCID:0000000188779917), Ji, Sanghyeon, Choi, Hyuk (ORCID:0000000278992631), Cho, Seunghee, Yoo, Seung, Choe, Jacob, Lee, Hyo, Bae, Sang, Oh, Jung, Woo, Hee, Shin, Seungmin, Lee, Kuntack, Kim, Tae-Hong, Jung, Yeon (ORCID:0000000277098347), Kwon, Ji-Hwan, Lee, Ju, Huh, Yoon, Kang, Sung, Kim, Hyun (ORCID:0000000181051640), Yuk, Jong (ORCID:0000000246777363). 2024-04-01. Abnormal Silicon Etching Behaviors in Nanometer-Sized Channels. https://doi.org/10.1021/acs.nanolett.4c00326

Cite the original work for its findings. Save a collection to share your selection of sources.