DOE OSTI · 3007123
Supporting Data for "Pitfalls in Parameters: Practical Process Development in Chemical Vapor Processing of SiC"
Abstract
CALculation of PHAse Diagrams (CALPHAD) was used to produce equilibrium phase diagrams of the MTS/H2 system. These were calculated in FactSage 8.2 using a combination of the FactPS and SGTE Solutions 2022 databases. Equilibrium was calculated for 185 gas species, 36 pure liquids, 8 pure solids, 1 liquid solution, and 22 solid solutions. Phase diagrams were calculated with 25 °C steps in temperature from 700 to 1325 °C and 10 torr steps in pressure from 20 to 760 torr.
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Lamm, Benjamin W [Oak Ridge National Laboratory] (ORCID:0000000340417786), Ramirez, Valencia [Oak Ridge National Laboratory] (ORCID:0009000502222824), Rogers, Alex [Oak Ridge National Laboratory] (ORCID:0000000177046873), Koyanagi, Takaaki [Oak Ridge National Laboratory] (ORCID:0000000172724049). 2026-07-22. Supporting Data for "Pitfalls in Parameters: Practical Process Development in Chemical Vapor Processing of SiC". https://doi.org/10.13139/ornlnccs%2F3007123
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