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DOE OSTI · 3027408

Thermal Metrology and Subsurface Evaluation of Heterogeneously Integrated Microelectronics

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Jarzembski, Amun [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)], Yates, Luke [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000150528944), Neely, Jason Christopher [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000287573228), Piontkowski, Zachary Tyler [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000262820106), Bahr, Matthew Nathaniel [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000759593938), Jordan, Matthew [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000345262664), Jauregui, Luis Jose [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000308978444), Lu, Ping [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000293697462), Hodges, Wyatt Lea [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000303868908), Nair, Siddharth [Purdue University], Semperlotti, Fabio [Purdue University]. 2025-04-01. Thermal Metrology and Subsurface Evaluation of Heterogeneously Integrated Microelectronics. https://doi.org/10.2172/3027408

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