DOE OSTI · 3365835
High aspect ratio structures enabled by backside illumination of SU-8
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Burckel, David Bruce [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:000000032222047X), Reyna, Robert [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000562995829), Risley, Mason James [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000052387057), Creason, Tielyr Dayne [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)], Gee, Gavin Christopher [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)]. 2025-05-01. High aspect ratio structures enabled by backside illumination of SU-8. https://doi.org/10.2172/3365835
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