DOE OSTI · 3369064
Silicon Fin Capacitor for Superconducting Quantum Circuits
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Finnegan, Patrick Sean [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000241166379), Skinner Ramos, Sueli Del Carmen [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000102592084), Reyna, Robert [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000562995829), Weatherred, Scott Edward [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000091734496), Carr, Stephen M [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000962352072). 2025-09-01. Silicon Fin Capacitor for Superconducting Quantum Circuits. https://doi.org/10.2172/3369064
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