DOE OSTI · 3407895
Soft X-ray reflection ptychography
Abstract
Scanning transmission X-ray microscopy and ptychography have become mature tools for high-resolution, element-specific imaging of nanoscale structures. However, transmission geometries impose stringent constraints on sample thickness and preparation, thereby limiting investigations of extended or bulk specimens, especially in the soft X-ray region. Here, we demonstrate reflection-geometry soft X-ray ptychography as a robust imaging mode. Instrumental feasibility and spatial resolution are established using a lithographically defined Siemens star and barcode test pattern on a multilayer substrate. We empirically demonstrate a full-pitch spatial resolution of ca. 45 nm from Fourier ring correlation analysis of the reconstructed object. The results highlight the potential of the reflection geometry for nondestructive X-ray studies of materials without the need for transmissive samples.
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Guenzing, Damian [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)], Sasaki, Dayne Y. [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States); Massachusetts Institute of Technology, Cambridge, MA (United States)] (ORCID:000000023800992X), Ditter, Alexander S. [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)], Levitan, Abraham L. [Paul Scherrer Institute PSI, Villigen (Switzerland)] (ORCID:0000000245682637), Gullikson, Eric M. [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)] (ORCID:0000000303377674), Dhuey, Scott [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)], Gashi, Arian [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)], Ohldag, Hendrik [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)], Roy, Sujoy [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)], Shapiro, David A. [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)], Comin, Riccardo [Massachusetts Institute of Technology, Cambridge, MA (United States)], Morley, Sophie A. [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)] (ORCID:0000000181972431). 2026-08-04. Soft X-ray reflection ptychography. https://doi.org/10.1364/oe.591755
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