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At least 181 records · Page 10

Aerodynamic Measurement Technology

Ohio State University developed a new spectrally filtered light-scattering apparatus based on a diode laser injected-locked titanium: sapphire laser and rubidium vapor filter at 780.2 nm. When the device was combined with a stimulated Brillouin scattering phase conjugate mirror, the realizable peak attenuation of elastic scattering interferences exceeded 105. The potential of the system was demonstrated by performing Thomson scattering measurements. Under USAF-NASA funding, West Virginia University developed a Doppler global velocimetry system using inexpensive 8-bit charged coupled device cameras and digitizers and a CW argon ion laser. It has demonstrated a precision of +/- 2.5 m/sec in a swirling jet flow. Low-noise silicon-micromachined microphones developed and incorporated in a novel two-tier, hybrid packaging scheme at the University of Florida used printed circuit board technology to realize a MEMS-based directional acoustic array. The array demonstrated excellent performance relative to conventional sensor technologies and provides scaling technologies that can reduce cost and increase speed and mobility.

Burner, Alpheus W.↗

Emerging Needs for Pervasive Passive Wireless Sensor Networks on Aerospace Vehicles

NASA is investigating passive wireless sensor technology to reduce instrumentation mass and volume in ground testing, air flight, and space exploration applications. Vehicle health monitoring systems (VHMS) are desired on all aerospace programs to ensure the safety of the crew and the vehicles. Pervasive passive wireless sensor networks facilitate VHMS on aerospace vehicles. Future wireless sensor networks on board aerospace vehicles will be heterogeneous and will require active and passive network systems. Since much has been published on active wireless sensor networks, this work will focus on the need for passive wireless sensor networks on aerospace vehicles. Several passive wireless technologies such as microelectromechanical systems MEMS, SAW, backscatter, and chipless RFID techniques, have all shown potential to meet the pervasive sensing needs for aerospace VHMS applications. A SAW VHMS application will be presented. In addition, application areas including ground testing, hypersonic aircraft and spacecraft will be explored along with some of the harsh environments found in aerospace applications.

Wilson, William C.↗

Review of Polyimides Used in the Manufacturing of Micro Systems

Since their invention, polyimides have found numerous uses in MicroElectroMechanical Systems (MEMS) technology. Polyimides can act as photoresist, sacrificial layers, structural layers, and even as a replacement for silicon as the substrate during MEMS fabrication. They enable fabrication of both low and high aspect ratio devices. Polyimides have been used to fabricate expendable molds and reusable flexible molds. Development of a variety of devices that employ polyimides for sensor applications has occurred. Micro-robotic actuator applications include hinges, thermal actuators and residual stress actuators. Currently, polyimides are being used to create new sensors and devices for aerospace applications. This paper presents a review of some of the many uses of polyimides in the development of MEMS devices, including a new polyimide based MEMS fabrication process.

Wilson, William C.↗

Creating a Realistic Weather Environment for Motion-Based Piloted Flight Simulation

A flight simulation environment is being enhanced to facilitate experiments that evaluate research prototypes of advanced onboard weather radar, hazard/integrity monitoring (HIM), and integrated alerting and notification (IAN) concepts in adverse weather conditions. The simulation environment uses weather data based on real weather events to support operational scenarios in a terminal area. A simulated atmospheric environment was realized by using numerical weather data sets. These were produced from the High-Resolution Rapid Refresh (HRRR) model hosted and run by the National Oceanic and Atmospheric Administration (NOAA). To align with the planned flight simulation experiment requirements, several HRRR data sets were acquired courtesy of NOAA. These data sets coincided with severe weather events at the Memphis International Airport (MEM) in Memphis, TN. In addition, representative flight tracks for approaches and departures at MEM were generated and used to develop and test simulations of (1) what onboard sensors such as the weather radar would observe; (2) what datalinks of weather information would provide; and (3) what atmospheric conditions the aircraft would experience (e.g. turbulence, winds, and icing). The simulation includes a weather radar display that provides weather and turbulence modes, derived from the modeled weather along the flight track. The radar capabilities and the pilots controls simulate current-generation commercial weather radar systems. Appropriate data-linked weather advisories (e.g., SIGMET) were derived from the HRRR weather models and provided to the pilot consistent with NextGen concepts of use for Aeronautical Information Service (AIS) and Meteorological (MET) data link products. The net result of this simulation development was the creation of an environment that supports investigations of new flight deck information systems, methods for incorporation of better weather information, and pilot interface and operational improvements for better aviation safety. This research is part of a larger effort at NASA to study the impact of the growing complexity of operations, information, and systems on crew decision-making and response effectiveness; and then to recommend methods for improving future designs.

Daniels, Taumi S.↗

Advancements in Force and Angle Measurement by the NFMTC

The National Force Measurement Technology Capability (NFMTC) is a nationwide partnership established in 2008 and sponsored by NASA’s Aeronautics Evaluation and Test Capabilities (AETC) project to maintain and further develop force and angle measurement capabilities primarily for NASA’s ground test facilities. One of the NFMTC’s primary objectives is to develop new force and angle measurement capabilities to meet the needs of researchers testing in NASA’s ground test facilities. This work will highlight several new capabilities that are either at or near operational readiness. A new six-component flow-through balance was designed and fabricated to support an upcoming retropropulsion test campaign at the NASA Langley Unitary Plan Wind Tunnel. The balance employs membranes in place of bellows, which have historically been used, and passes the flow through load bearing parts of the balance. Flow through the balance is optimized via the addition of flow guides, which are manufactured as separate parts, and attached to the balance. Calibration of this new flow-through balance demonstrates that it can suitably characterize the load and pressure ranges it was designed for, which provides aero researchers a new tool to directly measure retropropulsion performance of powered descent vehicles. Balances used in NASA’s ground test facilities are typically either single-piece balances or floating-frame balances. Historically, these two types of balances have generally used different front-end (model) attachments. Single-piece balances generally have a cylindrical front end that is forward of any measuring sections and at a reduced diameter relative to the balance outer diameter. Floating-frame balances generally have front end fits that extend over one or more measuring sections and that engage at the balance outer diameter. Recently, the NFMTC fabricated a single-piece balance with a front end fit that is compatible with the hardware used to calibrate floating-frame balances. Calibration results evaluating this front end fit will be presented. From a recent survey of angle measurement needs, the development of smaller angle measurement packages was identified as one area of improvement. Micro-electromechanical systems (MEMS) are continually being refined to provide high performance accelerometers that are a fraction of the volume of the quartz flexure based accelerometers that are standard in wind tunnels. A survey of commercial off-the-shelf MEMS accelerometers was conducted, and it identified the Safran Colibrys MS lines to be of adequate performance. Single-axis test boards and tri-axis rigid-flex production boards were designed and fabricated with a volume of approximately .18 cubic inches. The boards were designed to provide all the necessary conditioning for the MEMS accelerometers at levels to meet or exceed all requirements for the MS line sensors. Preliminary testing of these assembled sensor packages has demonstrated acceptable performance for wind-tunnel angle measurement. Several new rotating balances are at various stages of completion for NASA Glenn Research Center’s fan drive rigs. These balances provide direct measurement of thrust and torque of a driven fan or fan section to provide an estimate of fan efficiency and net thrust. Three two-component balances have been recently completed, and one six-component balance is in active development. A custom rotating telemetry system has been developed to support testing with these balances, and the telemetry system is integrated into the forward end of each one. The telemetry system is designed to remove mechanical sliprings by using an optical ethernet-based slipring for data transmission.

Force measurement↗

In Situ High-Temperature Ultrafast Electron Diffraction through Integrated Furnace and MEMS Platforms

Temperature fundamentally governs phase stability, defect evolution, and transport behavior in materials. Despite its central role, direct measurements of structural evolution at elevated temperatures on ultrafast timescales have remained limited. Here, we report the design, integration, and validation of 2 complementary in situ heating platforms that substantially extend the thermal operating range of ultrafast electron diffraction (UED). A compact furnace-type heating stage enables stable diffraction measurements from room temperature to 800 K with ±0.1 K stability under ultrahigh vacuum, achieved through multi-sensor feedback control, dual air-cooling channels, and a thermally isolated motion stage. In parallel, a microelectromechanical system (MEMS)-based heating platform provides rapid thermal response and access to extreme temperatures ≥1,373 K with ±0.1 K stability over hundreds-micrometer regions while supporting simultaneous electrical biasing for electrothermal coupling studies. Absolute temperature calibration is established using diffraction-based thermometry via aluminum lattice expansion and independently validated through in situ melting of bismuth thin films. UED measurements further reveal pronounced temperature-dependent nonequilibrium lattice dynamics in bismuth, including modifications to electron–phonon coupling and Debye–Waller behavior, as well as enhanced ultrafast diffuse scattering in aluminum at elevated temperatures. Together, these developments establish a practical framework for quantitative, time-resolved studies of temperature-driven kinetics and nonequilibrium structural dynamics under extreme thermal environments.

Bai, Qianqian [Chinese Academy of Sciences (CAS), ↗

Silicon Micromachined Sensor for Broadband Vibration Analysis

The development of a family of silicon based integrated vibration sensors capable of sensing mechanical resonances over a broad range of frequencies with minimal signal processing requirements is presented. Two basic general embodiments of the concept were designed and fabricated. The first design was structured around an array of cantilever beams and fabricated using the ARPA sponsored multi-user MEMS processing system (MUMPS) process at the Microelectronics Center of North Carolina (MCNC). As part of the design process for this first sensor, a comprehensive finite elements analysis of the resonant modes and stress distribution was performed using PATRAN. The dependence of strain distribution and resonant frequency response as a function of Young's modulus in the Poly-Si structural material was studied. Analytical models were also studied. In-house experimental characterization using optical interferometry techniques were performed under controlled low pressure conditions. A second design, intended to operate in a non-resonant mode and capable of broadband frequency response, was proposed and developed around the concept of a cantilever beam integrated with a feedback control loop to produce a null mode vibration sensor. A proprietary process was used to integrat a metal-oxide semiconductor (MOS) sensing device, with actuators and a cantilever beam, as part of a compatible process. Both devices, once incorporated as part of multifunction data acquisition and telemetry systems will constitute a useful system for NASA launch vibration monitoring operations. Satellite and other space structures can benefit from the sensor for mechanical condition monitoring functions.

Gutierrez, Adolfo↗

A MEMS dynamic mechanical analyzer for in situ viscoelastic characterization of 3D printed nanostructures

Cellular metamaterial structures with sub-micron features have shown the ability to become excellent energy absorbing materials for impact mitigation due to the enhanced mechanical properties of materials at the nanoscale. However, in order to optimize the design of these energy absorbing metamaterial structures we need to be able to measure the dynamic properties of the sub-micron features such as storage and loss moduli and the loss factor. Therefore, at scale testing is required to capture the scale, temperature, and strain rate dependent material properties of these nanoscale materials. This study presents the design, fabrication, and calibration of a MEMS-based dynamic mechanical analyzer (DMA) that can be directly integrated with the two photon lithography (TPL) process commonly used to fabricate metamaterial structures with nanoscale features. The MEMS-based DMA consists of a chevron style thermal actuator used to generate a tensile load on the structure and two differential capacitive sensors on each side of the structure used to measure load and displacement. This design demonstrated 1.5 ± 0.75 nm displacement resolution and 104 ± 52 nN load resolution, respectively. Dynamic mechanical analysis was successfully conducted on a single nanowire feature printed between the load and displacement stages of the MEMS device with testing frequencies ranging between 0.01–10 Hz and testing temperatures ranging between 22 °C–47 °C. These initial tests on an exemplar TPL part demonstrate that the printed nanowire behaves as a viscoelastic material wherein the transition from glassy to viscous behavior has already set in at the room temperature.

42 ENGINEERING↗

A High-Throughput MEMS-Based Differential Scanning Calorimeter for Direct Thermal Characterization of Antibodies

Calorimeters, which can be used for rapid thermal characterization of biomolecules, are getting intense attention in drug development. This paper presents a novel MEMS-based differential scanning calorimeter (DSC) for direct thermal characterization of protein samples. The DSC consisted of a pair of temperature sensors made by vanadium oxide (VOx) film with a temperature coefficient of resistivity of –0.025/K at 300 K, a microfluidic device with high thermal insulation (2.8 K/mW), and a Peltier heater for linear temperature scanning. The DSC exhibited high sensitivity (6.1 µV/µW), low noise (0.4 µW), high scanning rate (45 K/min), and low sample consumption volume (0.63 µL). The MEMS DSC was verified by measuring the temperature-induced denaturation of lysozyme at different pH, and then used to study the thermal stability of a monoclonal antibody (mAb), an antigen-binding fragment (Fab), and a dual variable domain immunoglobulin (DVD-Ig) at pH = 6. The results showed that lysozyme is a stable protein in the pH range of 4.0–8.0. The protein stability study revealed that the transition temperatures of the intact Fab fragment, mAb, and DVD proteins were comparable with conformational stability results obtained using conventional commercial DSC. These studies demonstrated that the MEMS DSC is an effective tool for directly understanding the thermal stability of antibodies in a high-throughput and low-cost manner compared to conventional calorimeters.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

On the Fabrication and Behavior of Diamond Microelectromechanical Sensors (DMEMS)

CVD (chemically vapor deposited) diamond films can be processed similar to "conventional" semiconductor device fabrication and as such can be used to achieve microelectromechanical structures (MEMS) also similar to, for example, silicon technology. Very small cantilever beams, membranes, stripes, tips, etc. can be constructed in doped and undoped diamond films and offer an array of choices in diamond with its known superior properties such as elastic modulus, high temperature semiconduction, high thermal conductivity, very low coefficient of expansion and numerous other diamond parameters. This paper will review the construction and behavior of the second generation DMEMS devices comprised as an accelerometer with a diamond diaphragm for use in very high G applications and a diamond pressure sensor for very high temperature and frequency response.

Holmes, K.↗

Advancements in MEMS Materials and Processing Technology

From achievements in display imaging to air bag deployment, microelectromechanical systems are becoming more commonplace in everyday life. With an abundance of opportunities for innovative R&D in the field, the research trends are not only directed toward novel sensor and actuator development, but also toward further miniaturization, specifically achieving micro- and nanoscaled intergrated systems.

MEMS Materials Microelectromechanical↗

THz semiconductor-based front-end receiver technology for space applications

Advances in the design and fabrication of very low capacitance planar Schottky diodes and millimeter-wave power amplifiers, more accurate device and circuit models for commercial 3-D electromagnetic simulators, and the availability of both MEMS and high precision metal machining, have enabled RF engineers to extend traditional waveguide-based sensor and source technologies well into the TI-Iz frequency regime. This short paper will highlight recent progress in realizing THz space-qualified receiver front-ends based on room temperature semiconductor devices.

Schottky diode multipliers↗

Micromechanical Broadband Infrared Sensors based on Piezoelectric Bending Resonators

There is a high demand for high-performance and low-cost uncooled infrared (IR) detectors. In order to meet this need we are investigating the use of MEMS piezoelectric resonator technology using aluminum nitride (AlN) thin films. Recent research has shown that piezoelectric resonators have the potential to be used as a core element for highly sensitive, low-noise, and low-power uncooled IR detectors. A novel design of an AlN IR sensor based on piezoelectric bending resonator is described and analyzed in this paper. The detector is constructed by using thermally mismatched materials which stress the resonator and shift the resonance frequency. The IR thermal input is sensed by monitoring the frequency shift induced by the in-plan thermal stress. These designs have the potential for very high sensitivity and are compatible with commercially viable CMOS fabrication technology.

Rais-Zadeh, Mina↗

MEMS for Space Flight Applications

Micro-Electrical Mechanical Systems (MEMS) are entering the stage of design and verification to demonstrate the utility of the technology for a wide range of applications including sensors and actuators for military, space, medical, industrial, consumer, automotive and instrumentation products.

AFM infrared microscopy IR light emission microsco↗

The Primordial Anisotropy Polarization Pathfinder Array (PAPPA): Instrument Overview and Status

PAPPA is a balloon-based experiment designed to measure the polarization of the Cosmic Microwave Background using candidate technology for an eventual Inflation Probe mission. It will survey a 20 x 20 degree patch of sky with 1 degree angular resolution covering 3 passbands centered at 100,200 and 300 GHz. Detection will be accomplished via antenna-coupled transition edge sensors (TESs) with SQUID-based readouts. In the eventual flight package, band defining filters and MEMS-based polarization modulators will be incorporated into the superconducting microstrip transmission lines that terminate in resistors that are thermally coupled to the TESs. The MEMS switches will allow on-chip polarization modulation that is faster than significant detector gain variations. The initial configuration will incorporate a simplified focal plane augmented by quasioptical polarization modulation. We describe the overall instrument design and present a summary of the current progress.

Chuss, David↗

Evaluation of Thermo-Mechanical Stability of COTS Dual-Axis MEMS Accelerometers for Space Applications

Microelectromechanical systems in MEMS is one of the fastest growing technologies in microelectronics, and is of great interest for military and aerospace applications. Accelerometers are the earliest and most developed representatives of MEMS. First demonstrated in 1979, micromachined accelerometers were used in automobile industry for air bag crash- sensing applications since 1990. In 1999, N4EMS accelerometers were used in NASA-JPL Mars Microprobe. The most developed accelerometers for airbag crash- sensing are rated for a full range of +/- 50 G. The range of sensitivity for accelerometers required for military or aerospace applications is much larger, varying from 20,000 G (to measure acceleration during gun and ballistic munition launches), and to 10(exp -6) G, when used as guidance sensors (to measure attitude and position of a spacecraft). The presence of moving parts on the surface of chip is specific to MEMS, and particularly, to accelerometers. This characteristic brings new reliability issues to micromachined accelerometers, including cyclic fatigue cracking of polysilicon cantilevers and springs, mechanical stresses that are caused by packaging and contamination in the internal cavity of the package. Studies of fatigue cracks initiation and growth in polysilicon showed that the fatigue damage may influence MEMS device performance, and the presence of water vapor significantly enhances crack initiation and growth. Environmentally induced failures, particularly, failures due to thermal cycling and mechanical shock are considered as one of major reliability concerns in MEMS. These environmental conditions are also critical for space applications of the parts. For example, the Mars pathfinder mission had experienced 80 mechanical shock events during the pyrotechnic separation processes.

Sharma, Ashok K.↗

Microelectromechanical Systems (MEMS) Broadband Light Source Developed

A miniature, low-power broadband light source has been developed for aerospace applications, including calibrating spectrometers and powering miniature optical sensors. The initial motivation for this research was based on flight tests of a Fabry-Perot fiberoptic temperature sensor system used to detect aircraft engine exhaust gas temperature. Although the feasibility of the sensor system was proven, the commercial light source optically powering the device was identified as a critical component requiring improvement. Problems with the light source included a long stabilization time (approximately 1 hr), a large amount of heat generation, and a large input electrical power (6.5 W). Thus, we developed a new light source to enable the use of broadband optical sensors in aerospace applications. Semiconductor chip-based light sources, such as lasers and light-emitting diodes, have a relatively narrow range of emission wavelengths in comparison to incandescent sources. Incandescent light sources emit broadband radiation from visible to infrared wavelengths; the intensity at each wavelength is determined by the filament temperature and the materials chosen for the filament and the lamp window. However, present commercial incandescent light sources are large in size and inefficient, requiring several watts of electrical power to obtain the desired optical power, and they emit a large percentage of the input power as heat that must be dissipated. The miniature light source, developed jointly by the NASA Glenn Research Center, the Jet Propulsion Laboratory, and the Lighting Innovations Institute, requires one-fifth the electrical input power of some commercial light sources, while providing similar output light power that is easily coupled to an optical fiber. Furthermore, it is small, rugged, and lightweight. Microfabrication technology was used to reduce the size, weight, power consumption, and potential cost-parameters critical to future aerospace applications. This chip-based light source has the potential for monolithic fabrication with on-chip drive electronics. Other uses for these light sources are in systems for vehicle navigation, remote sensing applications such as monitoring bridges for stress, calibration sources for spectrometers, light sources for space sensors, display lighting, addressable arrays, and industrial plant monitoring. Two methods for filament fabrication are being developed: wet-chemical etching and laser ablation. Both yield a 25-mm-thick tungsten spiral filament. The proof-of-concept filament shown was fabricated with the wet etch method. Then it was tested by heating it in a vacuum chamber using about 1.25 W of electrical power; it generated bright, blackbody radiation at approximately 2650 K. The filament was packaged in Glenn's clean-room facilities. This design uses three chips vacuum-sealed with glass tape. The bottom chip consists of a reflective film deposited on silicon, the middle chip contains a tungsten filament bonded to silicon, and the top layer is a transparent window. Lifetime testing on the package will begin shortly. The emitted optical power is expected to be approximately 1.0 W with the spectral peak at 1.1 mm.

Tuma, Margaret L.↗

Plasma Enhanced Growth of Carbon Nanotubes For Ultrasensitive Biosensors

The multitude of considerations facing nanostructure growth and integration lends itself to combinatorial optimization approaches. Rapid optimization becomes even more important with wafer-scale growth and integration processes. Here we discuss methodology for developing plasma enhanced CVD growth techniques for achieving individual, vertically aligned carbon nanostructures that show excellent properties as ultrasensitive electrodes for nucleic acid detection. We utilize high throughput strategies for optimizing the upstream and downstream processing and integration of carbon nanotube electrodes as functional elements in various device types. An overview of ultrasensitive carbon nanotube based sensor arrays for electrochemical biosensing applications and the high throughput methodology utilized to combine novel electrode technology with conventional MEMS processing will be presented.

Cassell, Alan M.↗