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Recent progress in atomic-scale controlled plasma processing

Atomic-scale control in plasma processing is becoming increasingly critical for fabricating of advanced semiconductor devices, particularly as the industry shifts toward three-dimensional (3D) architectures and high-aspect-ratio (HAR) structures. This review presents a comprehensive overview of recent developments in atomic-scale controlled plasma processes, organized along two key directions: the hierarchical structure of plasma–surface interactions and the generational evolution of atomic layer processing (ALP) technologies. We examined the gas phase, where molecular design enables selective generation of ions and radicals; the boundary layer, where transport phenomena govern species delivery into nanoscale features, and the surface, where temperature-dependent reactions and cyclic processing determine etching selectivity and precision. Building on this foundation, we outline five generations of ALP—from thermal atomic layer deposition to transport-aware, temporally and structurally decoupled processes—highlighting the increasing sophistication of process control. The review further explores the transition from empirical recipe development to science-based, data-driven methodologies. By integrating quantum-chemical modeling, advanced diagnostics, and machine learning, we demonstrated how predictive models can link plasma species composition to process outcomes, enabling autonomous and adaptive control strategies. Finally, this review discusses the broader societal implications of plasma process innovation through the E4 quartet: energy and resource efficiency, environmental sustainability, evolutionary advancement, and educational promotion. These principles guide the development of sustainable and intelligent atomic-scale manufacturing technologies that are not only technically advanced but also socially responsible.

Ishikawa, Kenji [Nagoya Univ. (Japan)] (ORCID:0000↗

Fundamental Processes of Atomization in Fluid-Fluid Flows

This report outlines the major results of the grant "Fundamental Processes of Atomization in Fluid-Fluid Flows." These include: 1) the demonstration that atomization in liquid/liquid shear flow is driven by a viscous shear instability that triggers the formation of a long thin sheet; 2) discovery of a new mode of interfacial instability for oscillatory two-layer systems whereby a mode that originates within the less viscous liquid phase causes interfacial deformation as the oscillation proceeds; 3) the demonstration that rivulet formation from gravity front occurs because the local front shape specified by gravity and surface tension changes from a nose to a wedge geometry, thus triggering a large increase in viscous resistance; and 4) extension of the studies on nonlinear wave evolution on falling films and in stratified flow, particularly the evolution towards large-amplitude solitary waves that tend to generate drops.

McCready, M. J.↗

Fundamental Processes of Atomization in Fluid-Fluid Flows

This paper discusses our proposed experimental and theoretical study of atomization in gas-liquid and liquid-liquid flows. While atomization is a very important process in these flows, the fundamental mechanism is not understood and there is no predictive theory. Previous photographic studies in (turbulent) gas-liquid flows have shown that liquid is atomized when it is removed by the gas flow from the crest of large solitary or roll waves. Our preliminary studies in liquid-liquid laminar flows exhibit the same mechanism. The two-liquid system is easier to study than gas-liquid systems because the time scales are much slower, the length scales much larger, and there is no turbulence. The proposed work is intended to obtain information about the mechanism of formation, rate of occurrence and the evolving shape of solitary waves; and quantitative aspects of the detailed events of the liquid removal process that can be used to verify a general predictive theory.

Gallagher, Christopher↗

Assessment of AFM - KPFM and SSRM for Measuring and Characterizing Materials Aging Processes

Atomic Force Microscopy (AFM), in conjunction with Peak Force Kelvin Probe Force Microscopy (PF-KPFM) and Peak Force Scanning Spreading Resistance Microscopy (PF-SSRM), was used to assess changes on thin metal films that underwent accelerated aging. The AFM technique provides a relatively easy, non-destructive methodology that does not require high-vacuum facilities to obtain nanometer-scale spatial resolution of surface chemistry changes. Surface morphology, roughness, contact potential difference, and spreading resistance were monitored to qualitatively identify effects of aging-morphology changes and oxidation of Au, Al, Cu thin film standards as well as diffusion of CuAu and AlAu thin film stacks at 65C under dried nitrogen flow conditions. AFM PF-KPFM and PF-SSRM modes have been exercised, refined and have proven to be viable and necessary early aging detection tools.

36 MATERIALS SCIENCE↗

Electron-atom /molecule/ collision processes

Electron-atom (molecule) collision processes at low and intermediate energies, from near threshold to a few hundred electron volts, are discussed. Attention is given to experimental techniques and procedures, electron impact cross sections, impact excitation and electron-atom scattering in laser fields. Specific examples are presented that illustrate various experimental techniques and interpretations of observations.

Trajmar, S.↗

Laser synthesis and processing of atomically thin 2D materials

Recent advances in laser synthesis and processing of 2D materials are described that address key issues of scalable synthesis, precise heterogeneity control, and transformative manufacturing. Here, laser spectroscopy is used to remotely characterize and optimize the structure and functionality of 2D materials, enabling their in-situ diagnostic-based synthesis and processing.

2D materials↗

Modeling of Turbulence Effects on Liquid Jet Atomization and Breakup

Recent experimental investigations and physical modeling studies have indicated that turbulence behaviors within a liquid jet have considerable effects on the atomization process. This study aims to model the turbulence effect in the atomization process of a cylindrical liquid jet. Two widely used models, the Kelvin-Helmholtz (KH) instability of Reitz (blob model) and the Taylor-Analogy-Breakup (TAB) secondary droplet breakup by O Rourke et al, are further extended to include turbulence effects. In the primary breakup model, the level of the turbulence effect on the liquid breakup depends on the characteristic scales and the initial flow conditions. For the secondary breakup, an additional turbulence force acted on parent drops is modeled and integrated into the TAB governing equation. The drop size formed from this breakup regime is estimated based on the energy balance before and after the breakup occurrence. This paper describes theoretical development of the current models, called "T-blob" and "T-TAB", for primary and secondary breakup respectivety. Several assessment studies are also presented in this paper.

Trinh, Huu P.↗

Metal powder production by gas atomization

The confined liquid, gas-atomization process was investigated. Results from a two-dimensional water model showed the importance of atomization pressure, as well as delivery tube and atomizer design. The atomization process at the tip of the delivery tube was photographed. Results from the atomization of a modified 7075 aluminum alloy yielded up to 60 wt pct. powders that were finer than 45 microns in diameter. Two different atomizer designs were evaluated. The amount of fine powders produced was correlated to a calculated gas-power term. An optimal gas-power value existed for maximized fine powder production. Atomization at gas-power greater than or less than this optimal value produced coarser powders.

Ting, E. Y.↗

Experimentally validated high-fidelity simulations of a liquid jet in supersonic crossflow

Here, utilizing recent advancements in computational schemes for compressible, multiphase flows, this work features a parametric study of a pure liquid jet in supersonic crossflow that involves simulating the atomization process for four values of momentum-flux ratio. These simulations are validated against experimental results measured with high-speed X-ray imaging, which confirm the accuracy of the numerical approach. Also, the effect of numerical resolution on some flow behavior is investigated, revealing convergence of the jet shape and surface instability wavelength. Analysis of the resulting sprays includes statistical descriptions of the liquid distribution, liquid structures created through breakup, interfacial instabilities, and dominant flow features. As the flowrate increases, the spray penetrates further, it becomes more disperse, and less liquid impacts the wall, but the droplet size distribution changes little. The wavelength of instabilities on the windward side of the jet diverges from measured trends in subsonic crossflows. In a visualization of the time-averaged flow, counter-rotating vortices are observed along the jet core and in the wake, affecting the process of primary atomization and early droplet trajectories.

42 ENGINEERING↗

Numerical analysis of SSME preburner injector atomization and combustion processes

The coaxial spray injection and combustion flowfields of a Space Shuttle Main Engine preburner injector element have been analyzed using a three-phase numerical code. The processes of atomization, evaporation, secondary droplet breakup, and multispecies chemistry, as well as turbulent diffusion, are included. The model produced realistic pictures of the complex internal flowfield, including liquid jet length, spray shape, flame-zone size and characteristics, and predicted temperatures that seem to be in agreement with test data envelopes. It predicted an external group combustion type of flame. Salient combustion and mixing features are discussed and sources of uncertainty are pointed out for future studies.

Liang, P. Y.↗

Modeling of Turbulence Effect on Liquid Jet Atomization

Recent studies indicate that turbulence behaviors within a liquid jet have considerable effect on the atomization process. Such turbulent flow phenomena are encountered in most practical applications of common liquid spray devices. This research aims to model the effects of turbulence occurring inside a cylindrical liquid jet to its atomization process. The two widely used atomization models Kelvin-Helmholtz (KH) instability of Reitz and the Taylor analogy breakup (TAB) of O'Rourke and Amsden portraying primary liquid jet disintegration and secondary droplet breakup, respectively, are examined. Additional terms are formulated and appropriately implemented into these two models to account for the turbulence effect. Results for the flow conditions examined in this study indicate that the turbulence terms are significant in comparison with other terms in the models. In the primary breakup regime, the turbulent liquid jet tends to break up into large drops while its intact core is slightly shorter than those without turbulence. In contrast, the secondary droplet breakup with the inside liquid turbulence consideration produces smaller drops. Computational results indicate that the proposed models provide predictions that agree reasonably well with available measured data.

Trinh, H. P.↗

Development of an Atomization Methodology for Spray Combustion

In liquid rocket propulsion, the knowledge and the understanding of liquid-gas interfacial phenomena are very important. This is important for predicting the onset of cavitation occurring in swirl injection elements used in STME, as well as atomization processes in shear-induced injectors (co-axial) and impinging injector elements. From the fact that all the physical processes including droplet size distribution, droplet dispersion, mixing and combustion are controlled by atomization processes, it is expected that the successful incorporation of the volume of fraction (VOF) will greatly enhance the analytical capability of predicting spray combustion processes in liquid-fueled engines. In this paper, a methodology is developed to define and track interfaces between two fluids in non-orthogonal, body-fitted grids using a single fractional volume of fluid (VOF) variable to describe the distribution of the liquid phase in a gas-liquid flow field. This method was implemented in a mature CFD code MAST (Multiphase All-Speed Transient) utilizing the general PISO-C algorithm. For the preliminary study on the analysis of spray combustion and tracking of the interface between two phases, we will report on the progress of the simulation of the instability on the liquid column; the surface wave instability and the droplet breakup from the liquid surface.

Seung, S. P.↗

Site-specific surface reactivity on SnO 2 : Evaluating selective atomic layer deposition processes

Area selective atomic layer deposition (AS-ALD) is a bottom-up synthesis approach with potential for deposition with molecular level precision. Here, the site-specific hydration of metal oxide substrates, combined with surface H 2 O-selective ALD processes, provides a potentially powerful path to targeted synthesis. Density functional theory (DFT) calculations are used to predict the thermodynamics of ALD precursor reactivity and hydration for (001), (101), (110), and (100) rutile SnO 2 facets as a function of temperature. Trimethylaluminum (TMA) and dimethyl aluminum isopropoxide (DMAI) dimers are predicted to react with both dehydrated and hydrated SnO 2 (001), (101), and (110) facets at ALD-relevant temperatures, while the SnO 2 (100) facet is predicted to be uniquely unreactive with TMA and DMAI monomers as well as dehydrate near 177 °C making this facet more amenable to targeted ALD. In situ ellipsometric studies of Al 2 O 3 ALD on polycrystalline SnO 2 at 150 °C are consistent with the computational predictions of rapid and unselective nucleation, in stark contrast to inhibited and selective ALD on isostructural rutile TiO 2 .

Atomic Layer Deposition↗

Laboratory studies of atomic collision processes of importance in planetary atmospheres

Progress in the following research supported under NSG 7386 is reported: (1) measurement of differential cross sections for atomic and molecular collisions relevant to analysis and modeling of data from Pioneer 11, Pioneer 12, Voyager 1, and Voyager 2; (2) analysis of measured differential cross section results to provide scattering data in forms that are easy to apply to atmospheric modeling work; (3) analysis of the data to give basic information on the molecular potentials involved in the scattering process; and (4) development and initial use of apparatus to study dissociative processes in neutral molecules.

Stebbings, R. F.↗

Numerical investigation of nonequilibrium electron effects on the collisional ionization rate in the collisional-radiative model

In this study, the interplay of kinetic electron physics and atomic processes in ultrashort laser-plasma interactions provides a comprehensive understanding of the impact of the electron energy distribution on plasma properties. Notably, nonequilibrium electrons play a vital role in collisional ionization, influencing ionization degrees and spectra. This paper introduces a computational model that integrates the physics of kinetic electrons and atomic processes, utilizing a Boltzmann equation for nonequilibrium electrons and a collisional-radiative model for atomic state populations. The model is used to investigate the influence of nonequilibrium electrons on collisional ionization rates and its effect on the population distribution, as observed in a widely known experiment. The study reveals a significant nonequilibrium electron presence during XFEL-matter interactions, profoundly affecting collisional ionization rates in the gas plasma, thereby necessitating careful consideration of the Collisional-Radiative model applied to such systems.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Near-field models and simulations of pellet ablation in tokamaks

Here, detailed numerical studies of the ablation of a single neon pellet in the plasma disruption mitigation parameter space have been performed. Simulations were carried out using FronTier, a hydrodynamic/low magnetic Reynolds number MHD code with explicit tracking of material interfaces. FronTier's physics models resolve the pellet surface ablation and the formation of a dense, cold cloud of ablated material, the deposition of energy from hot plasma electrons, the expansion of the ablation cloud along magnetic field lines, and the radiation losses. A local thermodynamic equilibrium model based on Saha equations has been used to resolve atomic processes in the cloud and Redlich–Kwong corrections to the ideal gas equation of state for cold and dense gases, which have been used near the pellet surface. The FronTier pellet code is a next generation of the code described. It has been validated against the semi-analytic improved neutral gas shielding model in the 1D spherically symmetric approximation. Main results include quantification of the influence of atomic processes and Redlich–Kwong corrections on the pellet ablation in spherically symmetric approximation and verification of analytic scaling laws in a broad range of pellet and plasma parameters. Using axially symmetric MHD simulations, the properties of ablation channels and the reduction of pellet ablation rates in magnetic fields of increasing strength have been studied. While the main emphasis has been given to neon pellets for the plasma disruption mitigation, selected results on deuterium fueling pellets have also been presented.

97 MATHEMATICS AND COMPUTING↗

Holographic diagnostics of breakup phenomena of impinging jets for liquid rocket motor applications

The use of pulsed laser holography in analyzing the atomization of impinging jets is evaluated using a holographic camera system capable of recording a 3D image of the atomization process in 3 x 10 exp -8 seconds. The holocamera and the experimental configuration and procedure are described in detail. Two nozzles were fabricated to produce 1-mm diameter liquid water jets that impinged at 60 and 90 deg. Holograms were obtained for each nozzle at liquid velocities of 20 and 40 m/s. Analysis of the holograms revealed the evolution of the jets from the plane of emergence through the region of droplet formation. Features of interest included the growth of disturbances prior to the breakup region and the effect of these disturbances on the formation of ligaments and liquid globules. Preliminary analyses show that waves of atomized liquid formed after impingement are closely correlated to waves measured on the jets, leading to the possibility of controlling the atomization process at the nozzle.

Hess, C. F.↗