Search NASA⌕ Search

SEARCH · Search NASA

Results for “Layer by layer deposition”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 91 records · Page 5

The polar layered deposits on Mars: Inference from thermal inertia modeling and geologic studies

It is widely believed that the Martian polar layered deposits record climate variations over at least the last 10 to 100 m.y., but the details of the processes involved and their relative roles in layer formation and evolution remain obscure. Weathering of the Martian layered deposits by sublimation of water ice can account for the thermal inertias, water vapor abundances, and geologic relationships observed in the Martian polar regions. The nonvolatile components of the layered deposits appears to consist mainly of bright red dust, with small amounts of dark dust. Dark dust, perhaps similar to the magnetic material found at the Viking Lander sites, may preferentially form filamentary residue particles upon weathering of the deposits. Once eroded, these particles may saltate to form the dark dunes found in both polar regions. This scenario for the origin and evolution of the dark material within the polar layered deposits is consistent with the available imaging and thermal data. Further experimental measurements of the thermophysical properties of magnetite and maghemite under Martian conditions are needed to better test this hypothesis.

Herkenhoff, K. E.↗

Adsorption Processes during Electrochemical Atomic Layer Deposition of Gold

Electrochemical atomic layer deposition (e-ALD) technique offers a simple and effective "wet chemistry" approach enabling high-precision monolayer-by-monolayer deposition of metal films. The process of e-ALD of Au involves lead underpotential deposition (PbUPD) followed by its redox replacement by a Au monolayer. The time evolution of the deposit mass during "one-pot" Au e-ALD is known to exhibit a unique three-stage response that is presently not well understood. In this work, we probe this response using voltammetry, electrochemical quartz crystal microgravimetry (e-QCM), and chronoamperometry to unravel the underlying mechanistic events during Au e-ALD. Furthermore, the presence of adsorbed Au +3 -ligand complex(es) (Au-L) on the Au surface is established. In stage I of e-ALD, this Au-L adsorbed layer is reduced to Au while a Pb UPD adlayer is formed. In stage II, the Pb UPD adlayer undergoes spontaneous surface-limited redox replacement by nobler Au under open-circuit conditions. Finally, in stage III, re-adsorption of the Au-L occurs on the newly deposited Au. Quantitative analysis of the deposit mass transients obtained under a variety of conditions provides an estimate of the Au-L mass and its molecular weight.

36 MATERIALS SCIENCE↗

Communication—Reduction of DC Resistance of Ni-Rich Lithium Transition Metal Oxide Cathode by Atomic Layer Deposition

A coating using Atomic layer deposition (ALD) of Al 2 O 3 was applied to Ni-rich lithium transition metal oxide cathode material. This ALD coating reduces the DC resistance (DCR) and increases the cycling performance of the Ni-rich cathode. Additionally, the reduced DCR comes from decreased solid electrolyte interphase (SEI) resistance on the anode, which is attributed to reduced transition metal deposition. This is due to the ALD coating preventing the direct contact between the cathode and the electrolyte, and therefore inhibits transition metal dissolution. This study suggests the promise of using ALD coating to reduce the DCR of Ni-rich cathode materials.

25 ENERGY STORAGE↗

An Introduction to Atomic Layer Deposition with Thermal Applications

Atomic Layer Deposition (ALD) is a cost effective nano-manufacturing technique that allows for the conformal coating of substrates with atomic control in a benign temperature and pressure environment. Through the introduction of paired precursor gases thin films can be deposited on a myriad of substrates ranging from glass, polymers, aerogels, and metals to high aspect ratio geometries. This talk will focus on the utilization of ALD for engineering applications.

0000↗

The Origin of the Terra Meridiani Sediments: Volatile Transport and the Formation of Sulfate Bearing Layered Deposits on Mars

The chemistry, sedimentology, and geology of the Meridiani sedimentary deposits are best explained by eolian reworking of the sublimation residue of a large scale ice/dust deposit. This large ice deposit was located in close proximity to Terra Meridiani and incorporated large amounts of dust, sand, and SO2 aerosols generated by impacts and volcanism during early martian history. Sulfate formation and chemical weathering of the initial igneous material is hypothesized to have occurred inside of the ice when the darker mineral grains were heated by solar radiant energy. This created conditions in which small films of liquid water were created in and around the mineral grains. This water dissolved the SO2 and reacted with the mineral grains forming an acidic environment under low water/rock conditions. Subsequent sublimation of this ice deposit left behind large amounts of weathered sublimation residue which became the source material for the eolian process that deposited the Terra Meridiani deposit. The following features of the Meridiani sediments are best explained by this model: The large scale of the deposit, its mineralogic similarity across large distances, the cation-conservative nature of the weathering processes, the presence of acidic groundwaters on a basaltic planet, the accumulation of a thick sedimentary sequence outside of a topographic basin, and the low water/rock ratio needed to explain the presence of very soluble minerals and elements in the deposit. Remote sensing studies have linked the Meridiani deposits to a number of other martian surface features through mineralogic similarities, geomorphic similarities, and regional associations. These include layered deposits in Arabia Terra, interior layered deposits in the Valles Marineris system, southern Elysium/Aeolis, Amazonis Planitia, and the Hellas basin, Aram Chaos, Aureum Chaos, and Ioni Chaos. The common properties shared by these deposits suggest that all of these deposits share a common formation process which must have acted over a large area of Mars. The results of this study suggest a mechanism for volatile transport on Mars without invoking an early greenhouse. They also imply a common formation mechanism for most of the sulfate minerals and layered deposits on Mars, which explains their common occurrence.

Niles, P.B.↗

Topography of the South Polar Cap and Layered Deposits of Mars: Viking Stereo Grametry at Regional and Local Scales

Layered deposits and residual polar caps on Mars may record the deposition of ice and sediment modulated by periodic climate change. Topographic information relating to layer thicknesses, erosional processes, and formation of dark spirals within these deposits has been sparce or unreliable until the arrival of MOLA in orbit in September 1997. To assist in evaluating these terrains prior to launch and to assess formation and erosion processes in the polar deposits, we have assembled Viking stereo mosaics of the region and have produced the first reliable DEM models of the south polar deposits using automated stereogrammetry tools. Here we report our preliminary topographic results, pending final image pointing updates. The maximum total thickness of the layered deposits in the south polar region is 2.5 km. The thick layered deposits consist of a series of megaterraces. Each terrace is several tens of kilometers wide and is flat or slopes very gently toward the pole. These terraces step downward from a central plateau near the south pole. Terraces are bounded by relatively steep scarps 100-500 meters high that face toward the equator. These scarps correspond to the pattern of dark spirals observed within the residual cap in southern summer, and are interpreted as ice or frost-free surfaces warmed by solar insolation. Several tongue-shaped troughs, with rounded cirquelike heads, are observed near the margins of the deposit. These troughs are 300-600 meters in deep and may be similar to troughs observed in the northern polar deposit.

Schenk, P.↗

Mild-Annealed Molecular Layer Deposition (MLD) Tincone Thin Film as Photoelectrochemically Stable and Efficient Electron Transport Layer for Si Photocathodes

Metalcone thin films, composed of inorganic–organic hybrids, are synthesized using molecular layer deposition (MLD) through reactions between organometallic precursors (e.g., Sn, Al, and Ti) and organic reactants (e.g., ethylene glycol and glycerol). Despite their unique properties, metalcones exhibit significant vulnerability to water due to their organic components, limiting their potential in electrochemical applications. This study focuses on enhancing the photoelectrochemical stability of tincone thin films in aqueous electrolyte while preserving their hybrid characteristics through mild annealing in air at 250 °C. As-deposited and vacuum-annealed tincone thin films exhibited significant degradation under these conditions, while high-temperature-annealed (500 °C) tincone thin films offered improved stability with a significant decline in charge transfer efficiency. In contrast, mild annealing in air maintained the C–O bond at half level and improved the stability and charge transport without compromising the unique characteristics of tincone. This was confirmed by ellipsometry, X-ray photoelectron spectroscopy (XPS), and Fourier transform infrared spectroscopy (FTIR). Mild-annealed tincone deposited on a lightly doped p-type silicon (p-Si) photocathode produced a 20-fold increase in CO volume compared to high-temperature annealed tincone in a CO 2 -saturated potassium bicarbonate (KHCO 3 ) electrolyte with dispersed graphene oxide–cobalt phthalocyanine (GO-CoPc) under 1 sun illumination at 0.9 V vs reversible hydrogen electrode (RHE), while maintaining the faradaic efficiency for CO and H 2 . These results suggest that mild-annealed tincone thin films hold significant potential as protective charge transport layers on silicon photocathodes for the aqueous CO 2 reduction reaction (CO 2 RR).

Annealing (metallurgy)↗

Few-cycle atomic layer deposition to nanoengineer polybenzimidazole for H 2 /CO 2 separation

Atomic layer deposition (ALD) creates uniform sub-nanometer films on a variety of surfaces and nanopore walls and has been used to modify polymers to improve surface affinity towards specific molecules, solvent resistance, and barrier properties to gases and vapors. Here, for the first time, we demonstrate that few-cycle ALD can be used to engineer functional polymers at a sub-nanometer scale to improve both molecular size-sieving ability and counterintuitively, gas permeability. Particularly, 1-cycle ALD treatment of polybenzimidazole (PBI) by sequential exposure to trimethylaluminum (TMA) and water vapor remarkably increases H 2 permeability by 120% - 270% and H 2 /CO 2 selectivity by 30% at 35–200 °C. The ALD not only deposits an AlOx layer on the surface but also enables the TMA to infiltrate and react with the bulk PBI to form an AlO x network, disrupting polymer chain packing and increasing chain rigidity. The membrane exhibits excellent stability when challenged with simulated syngas, overcoming the permeability/selectivity tradeoff for H 2 /CO 2 separation. In conclusion, this study showcases a facile and scalable way of engineering polymeric membranes at a sub-nanometer level to improve molecular separation performance.

36 MATERIALS SCIENCE↗

Growth chemistry of cobalt nitride by plasma enhanced atomic layer deposition

State-of-the-art atomic layer deposition (ALD) and photoemission characterisation are applied to grow and characterise cobalt nitride, a material that has applications in renewable energy and semiconductor technologies. The growth process is characterised using an in situ cycle-by-cycle methodology to identify the main factors which underpin optimal material growth. The role of co-reactant dosing and substrate temperature is analysed in detail to demonstrate the impact these parameters have on the overall composition of the film. The in situ approach, combined with high-energy synchrotron-based photoemission studies of the resulting films, enables understanding of the bulk chemical properties without need for physical removal of material by sputtering. The results provide an insight into optimising plasma assisted ALD processes for deposition of cobalt nitride, and strategies for minimizing carbon incorporation into the film from the precursor ligands.

36 MATERIALS SCIENCE↗

Nano-layer deposition of metal oxides via a condensed water film

Abstract Nanocoatings on solids can be achieved by various processes, including sol-gel and atomic layer deposition. However, challenges remain for achieving uniform nanocoatings on nanoscale substrates at a large scale. Here, we report a versatile and fundamentally different technique, termed condensed layer deposition, for depositing conformal metal oxide nanocoatings on nanoparticles and nanofibers. This approach involves water in liquid hydrocarbons condensing as a nanoscale water film on the substrate surface, enabled by interfacial tension between polar water and nonpolar liquid hydrocarbons. Chemical precursors are then added, which react with the condensed water film to form a metal oxide nanocoating. We demonstrate this for titania, alumina, and niobia on substrates including carbon nanotubes, iron oxide particles and carbon black. Condensed layer deposition can achieve oxide nanocoatings on a variety of substrates with tunable thickness, in one pass, at room temperature.

36 MATERIALS SCIENCE↗

Applications of Atomic Layer Deposition in the Modification of Carbon Nanotubes

Atomic Layer Deposition (ALD) is a cost-effective nanoadditive-manufacturing technique that allows for conformal coating of substrates with atomic control in a benign temperature and pressure environment. Using paired precursor gases, thin films can be deposited on flat or textured surfaces ranging from glass, polymers, aerogels, and metals. Through atomic layer control, where single layers of atoms are deposited, fabrication of metal transparent films, nano-laminates, and coatings of nano-channels and pores is achievable. Reaction mechanisms in ALD are normally self-limiting, allowing for atomically accurate control of nanometer (nm) thicknesses. Therefore, high uniformity and precise thickness control make ALD an attractive process for the creation of novel nano-scale devices. Decreases in resistivity and density of electrical wire are needed to improve the function of electronics, electric motors and cables. Such improvements may be accomplished by adding ballistically conducting, metallic carbon nanotubes (CNT) to Cu. ALD was used to coat multiple substrates including CNT with Cu in an effort to make CNT-Cu composites which is more conductive and less dense than Cu. In addition, ALD can be used to as a method to deposit the catalyst layer seed layer for CNT growth using Ni. The ALD of copper metallic films can follow multiple reaction pathways depending on the ALD precursors used. For this work the reaction pathway was deposition of copper oxide and then post process annealing in a hydrogen environment. Copper(II) diacetylacetonate (Cu(acac)2) and ozone are used as precursors for copper oxide. As-deposited copper oxide films prepared at 180°C resulted in a growth per cycle of 1.0 A/cycle with low film resistivity.

Dwivedi, Vivek H.↗

Thermodynamics of MgO Atomic Layer Deposition Surface Reactions

The realities of atomic layer deposition (ALD) surface reactions often deviate from the simple ligand exchange frequently used to illustrate the technique. A detailed understanding of these reactions is necessary to develop greater surface synthetic control including chemical selectivity for patterning or to target defects. Here, the thermodynamics of surface reactions relevant to MgO ALD were investigated using pyroelectric calorimetry to measure the time-resolved heat generation. These reactions show exothermic heat generation of 0.12 mJ/cm 2 and 0.15 mJ/cm 2 for alternating Mg(CpEt) 2 and H 2 O reactions, respectively. The total reaction heat closely matches the standard reaction enthalpy for bulk MgO, supplemented with first-principles molecular calculations. First-principles models further reveal that while simple ligand exchange is favorable during surface reactions, the required increase in Mg-coordination number from two in the precursor to six in bulk MgO requires additional coverage-dependent surface reactions, which depend on the availability and stability of proximal surface hydroxyls.

36 MATERIALS SCIENCE↗

Nucleation Effects in the Atomic Layer Deposition of Nickel–Aluminum Oxide Thin Films

Atomic layer deposition (ALD) has become an important technique to synthesize a wide variety of materials on the subnanometer length scale. Expanding the library of ALD for ternary materials is vital for applications in which ternary materials allow for tuning of physical, optical, and electronic properties. In this work reported herein, we demonstrate the first report of nickel–aluminum oxide (Ni–Al–O) films deposited by ALD using nickeloceneozone and trimethylaluminum-water as reactants. While deposition of a wide range of compositions is achieved, the observed growth per cycle (GPC) did not follow the simple combination of GPCs measured for the binary ALD processes. Nucleation studies performed to better understand this behavior reveal that the deposition of aluminum oxide is greatly enhanced on a NiO surface prepared by nickelocene and ozone. A model is developed that considers nucleation effects to predict composition and thickness as a function of supercycle recipe. Characterization of the deposited films shows that Al-doping of NiO results in contraction of the NiO lattice, decreased crystallinity, and reduced density, and that films become completely amorphous at compositions with less than 50% Ni. In addition, Al-doped NiO films deposited by ALD are investigated as a hole-selective transport layer in lead-based perovskite solar cells. An Al doping of ~4% improves power conversion efficiency of the perovskite-based devices over that of NiO primarily through increases in fill factor.

36 MATERIALS SCIENCE↗

Tunable and scalable fabrication of plasmonic dimer arrays with sub-10nm nanogaps by area-selective atomic layer deposition

Nanogaps in metallic nanostructures produce local field enhancements with potential applications in surface enhanced spectroscopy, solar energy conversion, and photocatalysis. Atomic layer deposition is applied as a conformal coating to modify nanogap sizes and tune the optical properties of plasmonic dimer arrays with sub-10 nm nanogaps. Nanostructures are fabricated using layers of gold and palladium to combine features of plasmonics and area-selective atomic layer deposition, where copper metal is deposited on palladium-covered surfaces. Direct measurements of optical extinction for successive smaller nanogaps and thicker copper coatings show that spectral features become broadened at first due to heating-induced shape changes but subsequently sharpen as copper coatings form on palladium structures. Furthermore, longitudinal resonances of plasmonic dimers blue shift for thin coatings due to heating and decreasing aspect ratio, but thicker coatings lead to red shifts due to narrowing nanogaps. Together, these results show that area-selective atomic layer deposition is a promising tool for achieving large area arrays of plasmonic dimers with sub-10 nm nanogaps.

Engineering↗

High-resolution topography and albedo of the South Polar layered deposits on Mars

Using a new photoclinometric technique with high-resolution Mariner 9 images, maximum slopes of 10 - 20 deg are found to occur on an exposure of layered deposits within the south polar residual cap of Mars. Stereophotogrammetry is used to constrain the photoclinometric solutions, which resolve layer thicknesses of 100-300 m. Albedo variations are correlated with slope, indicating that frost is present on level areas. There is evidence for temporal changes in frost distribution in the seven days between the to images used in this study. The magnitude of the slopes derived here and consideration of the stability of water ice at the surface of the layered deposits strongly suggest the presence of a competent weathering rind. The weathered surface may be composed of dark filamentary sublimation residue particles that protect the underlying ice from solar heating. This hypothesis is consistent with previous studies of the regional color and albedo of the layered deposits, which indicate that the deposits are slightly darker and less red than the bright dust that mantles much of the south polar region. Furthermore, the proposed weathering mechanism provides a plausible source of dark, saltating material for the Martian polar dune fields.

Herkenhoff, Ken E.↗

Selective Hydroxylation of In 2 O 3 as A Route to Site-Selective Atomic Layer Deposition

We report that several atomic layer deposition (ALD) processes are now known that leverage the distinct surface chemistry of two disparate substrates (e.g., metal vs oxide) to realize markedly different ALD nucleation rates in an approach referred to as area-selective ALD. In contrast, few ALD processes have been identified that allow selective reaction at distinct surface sites of a single material surface, in a process that might be called site-selective ALD (SS-ALD). We describe one potential strategy to discriminate among several distinct surface sites on bixbyite In 2 O 3 to achieve site selectivity. Using density functional theory, we predict the discriminant hydration and hydroxylation of In 2 O 3 terrace and step-edge sites that depend strongly on the substrate temperature at low water coverage. Infrared measurement of surface hydroxyls on In 2 O 3 nanoparticles supports the predicted temperature dependence. The in situ examination of MgO ALD nucleation also shows results consistent with the predicted temperature dependence of In 2 O 3 hydroxylation. Together, these findings suggest that a selective hydroxylation approach may be a viable route to SS-ALD on In 2 O 3 .

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Radar Attenuation Characteristics of Low Reflectivity Zones in the Martian South Polar Layered Deposits

Both sets of Martian polar layered deposits (PLDs) display semi-rhythmic reflector stratigraphy in radargrams. The southern PLDs (SPLD), among other peculiarities, also contain widespread, distinctive deposits with few to no reflections that commonly occur at or near the top of the stratigraphic column. Here, we study the low reflectivity zones (LRZs) to determine if they exhibit radar properties indicative of non-water ice. We find that the previously reported CO2-ice LRZ exhibits a distinct radar signature compared to all other LRZs. We also find behavior that suggests the other LRZs may contribute to increased radar signal attenuation, which does not support a CO2 ice composition. We observe many instances of LRZs comprising the entire SPLD column and find that the radar attenuation varies across different LRZs, suggesting unique properties within each of these deposits. Variable radar attenuation of LRZs may be connected to differences in bulk compositions, radar-sensitive roughness characteristics, and/or distributions of stratigraphic materials.

N Abu Hashmeh↗