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NASA's Surface Metrology is presented in viewgraph form. The topics include: 1) Facilities/Major Equipment; 2) Taylor Hobson NanoStep II; 3) Topometrix; and 4) Surface Metrology Applications.
The surface finishing of X ray grazing incidence optics is a most demanding area of optical processing, both in terms of metrology and application of optical finishing techniques. An existing optical mirror was processed using a new removal technique that uses a jet of finely dispersed and extremely small particles that impact a surface, which under the correct conditions, produces an ultrasmooth surface, especially on aspheric curvatures. The surfaces of the SO56 mirror are tapered conical shapes that have a continuously changing radius with the primary mirror having a parabolic shape and the secondary mirror a hyperbolic shape. An optical ray trace that was conducted of a telescope used the measured parameters from the existing substrates to set up the prescription for the optical layout. The optimization indicated a wavefront performance of 0.10 A at 0.633 micron.
A multi-channel heterodyne laser interferometer is proposed for measurement of optical surface deformations at the sub-nanometer level.
A multi-channel heterodyne laser interferometer is proposed for the JPL Thermo-Opto-Mechanical Testbed, which requires the measurement of optical surface deformations at the sub-nanometer level.
In this paper the details of the design, construction and performance of these triplet of interferometers are presented.
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Very high resolution spatial interferometry requires picometer level one-dimensional metrology, surface metrology, and 3-dimensional metrology. The absolute distance measurements with accuracies of only 1 part in a million are required due to the careful design of spacecraft like the proposed Stellar Interferometry Mission (SIM), carrying high resolution stellar interferometers. An absolute calibration system for the surface gauge described in a previous paper is demonstrated. A self-calibrating absolute metrology system with a repeatability of 2 microns rms over a one-way distance of a meter is demonstrated. The accuracy calibration of this gauge is in progress. An auto-aligning, 3-dimensional metrology gauge is constructed using the sub-picometer linear metrology gauge described in earlier papers. Initial test results from this demonstration are presented.
Marshall Space Flight Center is developing the method of direct fabrication for high resolution full-shell x-ray optics. In this technique the x-ray optics axial profiles are figured and polished using a computer-controlled ZeekoIRP600X polishing machine. Based on the Chandra optics fabrication history about one third of the manufacturing time is spent on moving a mirror between fabrication and metrology sites, reinstallation and alignment with either the metrology or fabrication instruments. Also, the accuracy of the alignment significantly affects the ultimate accuracy of the resulting mirrors. In order to achieve higher convergence rate it is highly desirable to have a metrology technique capable of in situ surface figure measurements of the optics under fabrication, so the overall fabrication costs would be greatly reduced while removing the surface errors due to the re-alignment necessary after each metrology cycle during the fabrication. The goal of this feasibility study is to demonstrate if the Phase Measuring Deflectometry can be applied for in situ metrology of full shell x-ray optics. Examples of the full-shell mirror substrates suitable for the direct fabrication
We describe the Metrology Data Processor (METDAT), the Optical Surface Analysis Code (OSAC), and their application to the image evaluation of the Far Ultraviolet Spectroscopic Explorer (FUSE) mirrors. The FUSE instrument - designed and developed by the Johns Hopkins University and launched in June 1999 is an astrophysics satellite which provides high resolution spectra (lambda/Delta(lambda) = 20,000 - 25,000) in the wavelength region from 90.5 to 118.7 nm The FUSE instrument is comprised of four co-aligned, normal incidence, off-axis parabolic mirrors, four Rowland circle spectrograph channels with holographic gratings, and delay line microchannel plate detectors. The OSAC code provides a comprehensive analysis of optical system performance, including the effects of optical surface misalignments, low spatial frequency deformations described by discrete polynomial terms, mid- and high-spatial frequency deformations (surface roughness), and diffraction due to the finite size of the aperture. Both normal incidence (traditionally infrared, visible, and near ultraviolet mirror systems) and grazing incidence (x-ray mirror systems) systems can be analyzed. The code also properly accounts for reflectance losses on the mirror surfaces. Low frequency surface errors are described in OSAC by using Zernike polynomials for normal incidence mirrors and Legendre-Fourier polynomials for grazing incidence mirrors. The scatter analysis of the mirror is based on scalar scatter theory. The program accepts simple autocovariance (ACV) function models or power spectral density (PSD) models derived from mirror surface metrology data as input to the scatter calculation. The end product of the program is a user-defined pixel array containing the system Point Spread Function (PSF). The METDAT routine is used in conjunction with the OSAC program. This code reads in laboratory metrology data in a normalized format. The code then fits the data using Zernike polynomials for normal incidence systems or Legendre-Fourier polynomials for grazing incidence systems. It removes low order terms from the metrology data, calculates statistical ACV or PSD functions, and fits these data to OSAC models for the scatter analysis. In this paper we briefly describe the laboratory image testing of FUSE spare mirror performed in the near and vacuum ultraviolet at John Hopkins University and OSAC modeling of the test setup performed at NASA/GSFC. The test setup is a double-pass configuration consisting of a Hg discharge source, the FUSE off-axis parabolic mirror under test, an autocollimating flat mirror, and a tomographic imaging detector. Two additional, small fold flats are used in the optical train to accommodate the light source and the detector. The modeling is based on Zernike fitting and PSD analysis of surface metrology data measured by both the mirror vendor (Tinsley) and JHU. The results of our models agree well with the laboratory imaging data, thus validating our theoretical model. Finally, we predict the imaging performance of FUSE mirrors in their flight configuration at far-ultraviolet wavelengths.
A new instrument was developed for chemical characterization of surfaces that combines the analytical power of Raman spectroscopy with the three-dimensional topographic information provided by conoscopic holography. The figure schematically depicts the proposed hybrid instrument. The output of the conoscopic holographic portion of the instrument is a topographical map of the surface; the output of the Raman portion of the instrument is hyperspectral Raman data, from which the chemical and/or biological composition of the surface would be deduced. By virtue of the basic principles of design and operation of the instrument, the hyperspectral image data would be inherently spatially registered with the topographical data. In conoscopic holography, the object and reference beams of classical holography are replaced by the ordinary and extraordinary components generated by a single beam traveling through a birefringent, uniaxial crystal. In the basic conoscopic configuration, a laser light is projected onto a specimen and the resulting illuminated spot becomes a point source of diffuse light that propagates in every direction. The laser beam is rasterscanned in two dimensions (x and y) perpendicular to the beam axis (z), and at each x,y location, the pattern of interference between the ordinary and extraordinary rays is recorded. The recorded interferogram constitutes the conoscopic hologram. Of particular significance for the proposed instrument is that the conoscopic hologram contains information on the z coordinate (height) of the illuminated surface spot. Hence, a topographical map of the specimen is constructed point-by-point by rastering the laser beam in the x and y directions and correlating the x and y coordinates with the z information obtained from the interferograms. Conoscopic imaging is an established method, and conoscopic laboratory instruments for surface metrology are commercially available. In Raman spectroscopy of a surface, one measures the spectrum of laser light scattered inelastically from a laser-illuminated spot on the surface. The wavelengths of the inelastically scattered light differ from that of the incident laser beam by amounts that correspond to the energies of molecular vibrations. The resulting vibrational spectrum can be used to identify the molecules. Raman spectroscopy is a standard laboratory technique for identifying mineralogical, biological, and other specific chemical compositions.
The Far Ultraviolet Spectroscopic Explorer is a NASA astrophysics satellite which produces high-resolution spectra in the far-ultraviolet (90.5-118.7 nm bandpass) using a high effective area and low background detectors. The observatory was launched on its three-year mission from Cape Canaveral Air Station on 24 June 1999. The instrument contains four coaligned, normal incidence, off-axis parabolic mirrors which illuminate separate Rowland circle spectrograph channels equipped with holographically ruled diffraction gratings and delay line microchannel plate detectors. The telescope mirrors have a 352 x 387 mm aperture and 2245 mm focal length and are attached to actuator assemblies, which provide on-orbit, tip, tilt, and focus control. Two mirrors are coated with silicon carbide (SiC) and two are coated with lithium fluoride over aluminum (Al:LiF). We describe mirror assembly in-flight optical and mechanical performance. On-orbit measurements of the far-ultraviolet point spread function associated with each mirror are compared to expectations based on pre-flight laboratory measurements and modeling using the Optical Surface Analysis Code and surface metrology data. On-orbit imaging data indicate that the mirrors meet their instrument-level requirement of 50 percent and 95 percent slit transmission for the high- and mid-resolution spectrograph entrance slits, respectively. The degradation of mirror reflectivity during satellite integration and test is also discussed. The far-ultraviolet reflectivity of the SiC- and AlLiF-coated mirrors decreased about six percent and three percent, respectively, between coating and launch. Each mirror is equipped with three actuators, which consist of a stepper motor driving a ball screw via a two-stage planetary gear train. We also discuss the mechanical performance of the mirror assemblies, including actuator performance and thermal effects.
For optical systems with circular apertures, wavefronts are often analyzed using Zernike polynomials, and individual Zernike functions are associated with familiar optical aberrations. For systems with noncircular apertures, or in practical situations in which wavefronts are measured at a limited number of points in the aperture, the Zernike polynomials are no longer an orthogonal basis for the measured data. Although there are an endless number of ways to create a basis for such measured data, a "Zernike-like" basis is useful to connect with our experience with the usual optical aberrations. In this paper, the steps required to identify a Zernike-like basis for wavefronts over sampled, irregular apertures are presented, based on the Gram-Schmidt orthogonalization technique. The benefits of analyzing optical wavefronts using an orthogonal basis specific to an optical system's aperture shape and wavefront sampling, instead of using the traditional Zernike polynomials, are detailed in two examples, from image-based wavefront sensing on a segmented-aperture telescope (the James Webb Space Telescope Testbed Telescope at Ball Aerospace) and from interferometer characterization for surface metrology of a hexagonal mirror segment.
The technical innovation involves refinement of the classic optical technique of averaging surface measurements made in different orientations with respect to gravity, so the effects of gravity cancel in the averaged image. Particularly for large, thin mirrors subject to substantial deformation, the further requirement is that mount forces must also cancel when averaged over measurement orientations. The zerogravity surface figure of a mirror in a hexapod mount is obtained by analyzing the summation of mount forces in the frame of the optic as surface metrology is averaged over multiple clockings. This is illustrated with measurements taken from the Space Interferometry Mission (SIM) PT-Ml mirror for both twofold and threefold clocking. The positive results of these measurements and analyses indicate that, from this perspective, a lighter mirror could be used; that is, one might place less reliance on the damping effects of the elliptic partial differential equations that describe the propagation of forces through glass. The advantage over prior art is relaxing the need for an otherwise substantial thickness of glass that might be needed to ensure accurate metrology in the absence of a detailed understanding and analysis of the mount forces. The general insights developed here are new, and provide the basic design principles on which mirror mount geometry may be chosen.
Additive manufacturing (AM) plays a significant role in the fabrication of regeneratively cooled rocket engine combustion chambers, where internal channels are used to transport high pressure propellants to keep the engine from overheating. Cooling channels are designed with thin walls between the cooling and combustion sides, experiencing high thermal and mechanical stresses from large temperature gradients and internal pressures. Hence, selecting materials suited for this environment and maintaining a high-quality processing for this critical application is of utmost importance. GRCop-alloys (Cu-Cr-Nb) were developed as an ideal material for combustion chambers due to its high conductivity and high strength at temperature, being employed as a structural member for the hotwall with excellent heat transfer capabilities. GRCop-42 (Cu, 4 at% Cr, 2 at% Nb) has significantly matured using the Laser Powder Bed Fusion (L-PBF) process through microstructure, mechanical and thermophysical properties and evaluations using hot-fire testing. Additionally, Laser Powder Directed Energy Deposition (LP-DED) has demonstrated successful deposition and geometry samples using GRCop-42. While the maturation in properties has focused on bulk material properties from standard test specimens, these cannot be extrapolated to be used in thin walls, as different features (i.e., microstructure, porosity, and surface texture) have a greater effect on thin walls, especially on AM structures built using L-PBF and LP-DED. This presentation provides an overview of the effects introduced by reducing the thickness on the fabrication, microstructure, surface metrology and subsequent mechanical properties of GRCop-42 using L-PBF and LP-DED as well as future work planned for this research.
Advances in optical testing are as important as advances in optical fabrication, because one can make only what one can measure, particularly for unconventional prescriptions, like aspheric and freeform optics. A new, high-precision metrology capability is utilized to close the gap between interferometric testing and lower precision, contact-probe-based coordinate measuring machines or laser tracker/radar metrology to accurately measure surfaces with large figure error. This nearly universal optical testing method employs an ultra-precision coordinate measuring machine equipped with a non-contact probe. It was developed to characterize a broad spectrum of optical surfaces including ones with high slopes, impossible to measure using traditional interferometric testing. Optical components, covering a wide range of prescriptions, such as large convex conics, high-sloped aspherics, grazing-incidence x-ray optics, and highly deformed flats, were successfully measured. The resulting data were reduced using custom-developed routines to determine the optic’s alignment, surface departure from design, and the as-built optical prescription. This information guided the fabrication and modeling of these optical components
The accuracy of the relative metrology gauge developed for the proposed OSI and SONATA missions is improved to sub-picometer level.
The optical surfaces for the Advanced X-ray Astrophysical Facility (AXAF), was studied. The applicability of precision machining technology to the manufacture of the AXAF objective mirrors and the proposed and alternative methods for manufacturing and testing; (1) the AXAF technology mirrors and (2) the AXAF high resolution mirror assembly were reviewed. Surface shape and smoothness metrology for grazing incidence X-ray surfaces and the feasibility of applying heterodyne surface profilometry to nonflat surfaces were investigated. Three sets of scattering flats with known surface profiles and microtopographic character produced by precision machining and polished precision machine surfaces were analyzed.