NASA NTRS · 20210003703
MEMS Micro Valve for Space Applications
Abstract
We report on the development of a Micro-Electro-Mechanical Systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micropropulsion, in-situ chemical analysis of the planet, or micro-fluidics experiments in micro-gravity.
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Tang, T., Bame, D., Tang, W., Chakraborty,I.. 1999-06-07. MEMS Micro Valve for Space Applications. https://ntrs.nasa.gov/citations/20210003703
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