DOE OSTI · 1140777
Off-Normal Patterned Etching Through Suspended Membranes.
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Burckel, David Bruce, Resnick, Paul James, Henry, Michael David, Finnegan, Patrick Sean. 2014-01-01. Off-Normal Patterned Etching Through Suspended Membranes.. https://www.osti.gov/biblio/1140777
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