DOE OSTI · 1822623
Machine learning detection and classification of defects in STM lithography data.
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Noble Hernandez, Daniel Alejandro, Ivie, Jeffrey Andrew, Kalinin, Sergei V, Ziatdinov, Maxim, Scrymgeour, David, Bussmann, Ezra, Mounce, Andrew. 2020-09-01. Machine learning detection and classification of defects in STM lithography data.. https://www.osti.gov/biblio/1822623
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