DOE OSTI · 1850850
Increased selectivity in area-selective ALD by combining nucleation enhancement and SAM-based inhibition
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de Paula, Camila, Bobb-Semple, Dara, Bent, Stacey F.. 2021-01-08. Increased selectivity in area-selective ALD by combining nucleation enhancement and SAM-based inhibition. https://doi.org/10.1557/s43578-020-00013-4
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