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DOE OSTI · 1870280

Rapid Ge Diffusion along Si/SiO2 Interfaces during High Temperature Oxidation for Quantum-Scale Structures.

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Thornton, Chappel Sharrock, Hicks, Benjamin, Turner, Emily, Wang, George T., Law, Mark, Jones, Kevin S.. 2021-05-01. Rapid Ge Diffusion along Si/SiO2 Interfaces during High Temperature Oxidation for Quantum-Scale Structures.. https://doi.org/10.2172/1870280

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