Focused Ion Beams for Deterministic Nanometer-Scale Quantum Device Fabrication.

Titze, Michael; Byeon, Heejun; Chandrasekaran, Vigneshwaran; Flores, Anthony; Htoon, Han; Mounce, Andrew; Bielejec, Edward

doi:10.2172/1888388

DOE OSTI · 1888388

Focused Ion Beams for Deterministic Nanometer-Scale Quantum Device Fabrication.

Titze, Michael·Byeon, Heejun·Chandrasekaran, Vigneshwaran·Flores, Anthony·Htoon, Han·Mounce, Andrew·Bielejec, Edward

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Titze, Michael, Byeon, Heejun, Chandrasekaran, Vigneshwaran, Flores, Anthony, Htoon, Han, Mounce, Andrew, Bielejec, Edward. 2021-09-01. Focused Ion Beams for Deterministic Nanometer-Scale Quantum Device Fabrication.. https://doi.org/10.2172/1888388

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